公开(公告)号：US5485498A

公开(公告)日：1996-01-16

申请号：US269593

申请日：1994-07-01

申请人： Whitson G. Waldo, III ,  Eric Brodsky ,  Franco Cerrina

发明人： Whitson G. Waldo, III ,  Eric Brodsky ,  Franco Cerrina

IPC分类号： G03F7/20 ,  G21K1/06

CPC分类号： G03F7/70058 ,  G21K1/06 ,  G21K2201/06

摘要： An x-ray interface (40) provides increased x-ray collection efficiency for use in x-ray photolithography. The interface (40) comprises a housing (44) having a plurality of mirrored funnels (46) for collecting the x-rays. The mirrored funnels (46) are shaped to partially collimate and focus the x-rays. The interface (40) collects a greater percentage of the available x-rays from an x-ray source, and the interface (40) also permits a greater number of beamlines to be coupled to the x-ray source.

摘要翻译： x射线界面（40）提供了用于x射线光刻的增加的x射线收集效率。 接口（40）包括具有用于收集X射线的多个镜像漏斗（46）的壳体（44）。 镜像的漏斗（46）被成形为部分地准直和聚焦x射线。 接口（40）从x射线源收集更多百分比的可用x射线，并且接口（40）还允许更多数量的束线耦合到x射线源。