公开(公告)号：US08912488B2

公开(公告)日：2014-12-16

申请号：US13677940

申请日：2012-11-15

Applicant: FEI Company

Inventor： Jason Arjavac

IPC: H01J37/00 ,  H01J37/26 ,  H01J37/20

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/20292 ,  H01J2237/31749

Abstract: A method for aligning a sample that is placed in the vacuum chamber so that the sample is oriented normal to the focused ion beam is disclosed. The locations of different spots on the sample surface are determined using a focusing routine. The locations of the different spots are used to create an image line or an image plane that determines the proper calibrations that are needed. The image line or image plane is then used to calibrate the sample stage so that the sample is aligned substantially normal to the focused ion beam.

Abstract translation: 公开了一种将放置在真空室中的样品对准以使样品垂直于聚焦离子束的方法。 使用聚焦程序确定样品表面上不同斑点的位置。 不同点的位置用于创建确定所需的适当校准的图像线或图像平面。 然后将图像线或图像平面用于校准样品台，使得样品基本上垂直于聚焦离子束排列。