Optical alignment system
    30.
    发明授权
    Optical alignment system 失效
    光学对准系统

    公开(公告)号:US3867038A

    公开(公告)日:1975-02-18

    申请号:US39280473

    申请日:1973-08-29

    Inventor: WESTELL WILLIAM

    CPC classification number: G03F9/7088 G01S3/786

    Abstract: A pair of relatively movable objects are aligned to each other in a predetermined relationship by matching images of fixed reticles on the objects to a rotating reticle by convolution of the fixed reticle images with the rotating reticle and generating analog image displacement signals representing the relative positions of the objects for closed loop control of the relative positions of the objects. The energy generated by the convolution of the objects is transduced by radiometric detectors to electrical signals having characteristic frequencies defining the relative positions of the objects. The characteristic frequencies are generated by a frequency phase lock control which provides interrogation of the objects by the reticle scan, the rotating reticle operating as a relative spatial reference which is phaselocked to a fixed frequency generated by a stable oscillator. Doppler frequencies corresponding to image velocities are digitally detected by doppler comparators and converted to doppler phase shift signals corresponding to the relative displacements of the objects. The digital doppler phase shift signals and digital signals corresponding to a desired offset between the objects are accumulated in a tracking register. The accumulated digital signals are converted to analog signals for closed loop control of the relative positions of the objects with respect to each other.

    Abstract translation: 一对相对移动的物体以预定的关系彼此对齐,通过将固定的标线片图像与旋转的掩模版卷积在一起,将固定的掩模版图像与对旋转掩模版相匹配,并产生表示相对位置的模拟图像位移信号 用于闭环控制对象的相对位置的对象。 由物体卷积产生的能量由辐射检测器转换成具有限定对象的相对位置的特征频率的电信号。 特征频率由频率锁相控制产生,该频率锁相控制通过标线扫描来提供物体的询问,旋转标线作为相位锁定到由稳定振荡器产生的固定频率的相对空间参考。 对应于图像速度的多普勒频率由多普勒比较器数字检测并转换成对应于物体的相对位移的多普勒相移信号。 数字多普勒相移信号和对应于物体之间的期望偏移的数字信号被累积在跟踪寄存器中。 累积的数字信号被转换为模拟信号,用于闭环控制对象相对于彼此的相对位置。

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