公开(公告)号：US11990309B2

公开(公告)日：2024-05-21

申请号：US17977825

申请日：2022-10-31

Applicant: GE Precision Healthcare LLC

Inventor： Andrew Thomas Cross ,  Uwe Wiedmann ,  Marshall Gordon Jones ,  Carey Rogers ,  John Scott Price ,  Joseph Darryl Michael ,  Sergio Lemaitre ,  Fulton Jose Lopez ,  Vasile Bogdan Neculaes ,  Steve Buresh ,  David Wagner

IPC: H01J35/06

CPC classification number: H01J35/066 ,  H01J35/064 ,  H01J2235/1212 ,  H01J2235/1291

Abstract: Various systems and methods are provided for a biased cathode assembly of an X-ray tube with improved thermal management and a method of manufacturing same. In one example, a cathode assembly of an X-ray tube comprises an emitter assembly including an emitter coupled to an emitter support structure, and an electrode assembly including an electrode stack and a plurality of bias electrodes. The emitter assembly including a plurality of independent components that are coupled together. The electrode assembly including a plurality of independent components that are coupled together, and the emitter assembly being coupled to the electrode assembly.

公开(公告)号：US20240274392A1

公开(公告)日：2024-08-15

申请号：US18413829

申请日：2024-01-16

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Atsushi ISHII ,  Akimichi SHIMIZU

IPC: H01J35/06 ,  H01J35/14

CPC classification number: H01J35/066 ,  H01J35/14

Abstract: An X-ray tube includes a housing, a cathode disposed in the housing and configured to release electrons, a target disposed in the housing and configured to generate X-rays upon incidence of the electrons, a first tubular body surrounding the cathode inside the housing, and a getter disposed in a region where a trajectory of the electrons from the cathode to the target is not allowed to be seen in an inner region of the first tubular body.

公开(公告)号：US11894209B2

公开(公告)日：2024-02-06

申请号：US17275021

申请日：2018-09-14

Applicant: COMET AG

Inventor： André Schu

IPC: H01J35/16 ,  H01J35/06 ,  H01J35/14

CPC classification number: H01J35/16 ,  H01J35/066 ,  H01J35/147 ,  H01J2235/083 ,  H01J2235/168

Abstract: A component part in a vacuum area of an X-ray tube with an opening through which an electron beam is guided. The component part includes a base body made of a first material, wherein the first material is a metal. Arranged on a surface forming the opening is a second material having an atomic number which is smaller than an atomic number of the first material. A target support is attached to an end of the component part. The target support supports a target which is aligned with a lens diaphragm formed at the end of the component part. The target support has a base body made of a first material which is a metal, and a second material formed on a surface of the base body that is selectively exposed to the electron beam and which extends between the target and the lens diaphragm.

公开(公告)号：US20230290603A1

公开(公告)日：2023-09-14

申请号：US17654046

申请日：2022-03-08

Applicant: GE Precision Healthcare LLC

Inventor： Kevin S. KRUSE

IPC: H01J35/14 ,  H01J35/06

CPC classification number: H01J35/14 ,  H01J35/064 ,  H01J35/066 ,  H01J2235/064

Abstract: Various methods and systems are provided for a cathode of an X-ray imaging system, the cathode comprising a cup and a ceramic insulator having a convex outer surface mating with corresponding pockets on the cup surrounding the ceramic insulator.

公开(公告)号：US11719652B2

公开(公告)日：2023-08-08

申请号：US17160006

申请日：2021-01-27

Applicant: KLA Corporation

Inventor： Yung-Ho Alex Chuang ,  John Fielden

IPC: G01N23/20008 ,  G01N23/201 ,  H01J35/06 ,  H01J35/14 ,  H01J35/18 ,  H01J3/02 ,  H05G1/02 ,  G03F7/20 ,  G03F7/00

CPC classification number: G01N23/20008 ,  G01N23/201 ,  G03F7/70633 ,  H01J3/022 ,  H01J35/065 ,  H01J35/066 ,  H01J35/147 ,  H01J35/18 ,  H05G1/02 ,  G01N2223/03 ,  G01N2223/054 ,  G01N2223/1016 ,  G01N2223/204 ,  G01N2223/6116 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/16 ,  H01J2235/18

Abstract: Methods and systems for realizing a high radiance x-ray source based on a high density electron emitter array are presented herein. The high radiance x-ray source is suitable for high throughput x-ray metrology and inspection in a semiconductor fabrication environment. The high radiance X-ray source includes an array of electron emitters that generate a large electron current focused over a small anode area to generate high radiance X-ray illumination light. In some embodiments, electron current density across the surface of the electron emitter array is at least 0.01 Amperes/mm2, the electron current is focused onto an anode area with a dimension of maximum extent less than 100 micrometers, and the spacing between emitters is less than 5 micrometers. In another aspect, emitted electrons are accelerated from the array to the anode with a landing energy less than four times the energy of a desired X-ray emission line.