公开(公告)号：US20220406638A1

公开(公告)日：2022-12-22

申请号：US17586448

申请日：2022-01-27

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Guancyun Li ,  Ching-Jung Chang ,  Chi-Feng Tung ,  Hsiang Yin Shen

IPC: H01L21/677 ,  B66C19/00 ,  B61B3/00 ,  H01L21/67

Abstract: An automated material handling system (AMHS) and a method of operating the AMHS are disclosed. In one aspect, the AMHS includes a network of rails and a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails. The AMHS also includes a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table. The AMHS further includes a hash rail connected to and overlapping the turn table. The hash rail is configured to rotate about the axis with the turn table.

公开(公告)号：US20220336242A1

公开(公告)日：2022-10-20

申请号：US17379734

申请日：2021-07-19

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Chieh Hsu ,  Guancyun Li ,  Ching-Jung Chang ,  Chi-Feng Tung

IPC: H01L21/67 ,  H01L21/677

Abstract: An AMHS interface management system configured to facilitate the exchange of lot information between distinct AMHS systems. The AMHS interface management system receives lot information from a first AMHS system in a first format and translates the lot information into a format associated with a second AMHS system. The AMHS interface management system utilizes a handshake area located between the first and second AMHS systems. The handshake area includes one or more vehicles that facilitate the movement of a lot between the first AMHS system and the second AMHS system.