公开(公告)号：US20220260419A1

公开(公告)日：2022-08-18

申请号：US17671983

申请日：2022-02-15

Applicant: Si-Ware Systems

Inventor： Yasser M. Sabry ,  Amr O. Ghoname ,  Momen Anwar ,  Diaa Khalil

IPC: G01J3/45 ,  G02B26/08 ,  G01J3/02 ,  G01J3/26 ,  G02B6/26 ,  G02F1/29

Abstract: Aspects relate to an integrated and compact attenuated total internal reflection (ATR) spectral sensing device. The spectral sensing device includes a substrate, a spectrometer, and a detector. The substrate includes an ATR element, a microfluidic channel, and a channel interface at a boundary between the ATR element and the microfluidic channel formed therein. The ATR element is configured to receive input light and to direct the input light to the channel interface for total internal reflection of the input light at the channel interface. An evanescent wave produced by a sample contained within the microfluidic channel based on the total internal reflection of the input light attenuates the light output from the ATR element and the resulting output light may be analyzed using the spectrometer and the detector.

公开(公告)号：US10782342B2

公开(公告)日：2020-09-22

申请号：US15818736

申请日：2017-11-20

Applicant: Si-Ware Systems

Inventor： Bassam Saadany ,  Mostafa Medhat ,  Muhammad Nagi ,  Ahmed Shebl ,  Yasser M. Sabry ,  Bassem Mortada ,  Diaa Khalil

IPC: G01R31/308 ,  G01M11/00 ,  B81C99/00 ,  G01R1/07 ,  G01R31/28 ,  G02B6/42 ,  G02B26/00

Abstract: Aspects relate to an integrated optical probe card and a system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures with an in-plane optical axis. On-wafer optical screening of optical MEMS structures may be performed utilizing one or more micro-optical bench components to redirect light between an out-of-plane direction that is perpendicular to the in-plane optical axis to an in-plane direction that is parallel to the in-plane optical axis to enable testing of the optical MEMS structures with vertical injection of the light.

公开(公告)号：US20180143245A1

公开(公告)日：2018-05-24

申请号：US15818736

申请日：2017-11-20

Applicant: Si-Ware Systems

Inventor： Bassam Saadany ,  Mostafa Medhat ,  Muhammad Nagi ,  Ahmed Shebl ,  Yasser M. Sabry ,  Bassem Mortada ,  Diaa Khalil

IPC: G01R31/308 ,  B81C99/00 ,  G02B26/00 ,  G02B6/42 ,  G01R31/28 ,  G01R1/07

Abstract: Aspects of the disclosure relate to an integrated optical probe card and a system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures with an in-plane optical axis. On-wafer optical screening of optical MEMS structures may be performed utilizing one or more micro-optical bench components to redirect light between an out-of-plane direction that is perpendicular to the in-plane optical axis to an in-plane direction that is parallel to the in-plane optical axis to enable testing of the optical MEMS structures with vertical injection of the light.

公开(公告)号：US09970819B2

公开(公告)日：2018-05-15

申请号：US15009755

申请日：2016-01-28

Applicant: Si-Ware Systems

Inventor： Diaa Khalil ,  Bassam A. Saadany ,  Yasser M. Sabry

IPC: G01J5/02 ,  G01J3/45 ,  G01J3/10 ,  G01J3/02 ,  G01J3/26 ,  G01J3/453

CPC classification number: G01J3/45 ,  G01J3/0256 ,  G01J3/108 ,  G01J3/26 ,  G01J3/453 ,  G01J3/4531 ,  G01J3/4532 ,  G01J3/4535

Abstract: A spectrometer with increased optical throughput and/or spectral resolution includes a plurality of interferometers coupled in parallel. An optical splitter divides a source light beam into a plurality of input beams and directs each of the input beams to a respective one of the plurality of interferometers. One or more detectors are optically coupled to receive a respective output from each of the plurality of interferometers and is configured to detect an interferogram produced as a result of the outputs.