公开(公告)号：US10401602B2

公开(公告)日：2019-09-03

申请号：US15172390

申请日：2016-06-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hoyeon Kim ,  Seongsue Kim

IPC: G02B19/00 ,  H05G2/00 ,  G21K1/06

Abstract: An extreme ultraviolet (EUV) light generator includes a collecting mirror having a first focal point and a second focal point, the first focal point being closer to the collecting mirror than the second focal point, a laser to generate a laser beam and to radiate the laser beam toward the first focal point of the collecting mirror, and a droplet generator to generate a droplet and to discharge the droplet at the first focal point of the collecting mirror, wherein the collecting mirror includes a concave reflective surface, a through hole in a center of the reflective surface, and a drip hole between the through hole and an outer circumferential surface of the reflective surface.

公开(公告)号：US09857690B2

公开(公告)日：2018-01-02

申请号：US15182926

申请日：2016-06-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hoyeon Kim ,  Jinseok Heo ,  Insung Kim

IPC: G03B27/54 ,  G03F7/20 ,  H05G2/00 ,  G02B19/00

CPC classification number: G03F7/70033 ,  G02B19/0095 ,  G03F7/70916 ,  H05G2/001

Abstract: An extreme ultraviolet generation device, including a chamber with an internal space; a plasma generator to generate plasma in the internal space; a condenser in the internal space to gather light generated from the plasma; and a monitor to monitor the internal space in an omnidirectional manner.

公开(公告)号：US10069327B2

公开(公告)日：2018-09-04

申请号：US15235674

申请日：2016-08-12

Applicant: Samsung Electronics Co., Ltd.

Inventor： Myungkee Lee ,  Joohan Kim ,  Jinman Kim ,  Hoyeon Kim ,  Chulhyung Yang ,  Jiwoo Lee

IPC: H01M10/44 ,  H01M10/46 ,  H02J7/02 ,  H02J50/10 ,  H02J7/04 ,  H04B7/00

Abstract: An electronic device and a method for charging a battery of the electronic device are provided. The electronic device includes a housing; a battery disposed within the housing; a first interface electrically or electromagnetically connected to a first external power source; a second interface electrically or electromagnetically connected to a second external power source; and a circuit electrically connected to the battery, the first interface, and the second interface, wherein the circuit changes a first voltage output from the first interface based on a second voltage output from the second interface, changes a first current output from the first interface based on a second current output from the second interface, and charges the battery based on the changed first current and second current.

公开(公告)号：US09078334B2

公开(公告)日：2015-07-07

申请号：US14105654

申请日：2013-12-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hoyeon Kim ,  Insung Kim ,  Jinho Jeon

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/006 ,  G03F7/70916 ,  H05G2/008

Abstract: An extreme ultraviolet light (EUL) source device is disclosed, the device comprising: a chamber in which a gas flow and a droplet stream are provided; a droplet generator through which target material is changed into the droplet stream; and a shroud positioned along the droplet stream, the shroud shielding the droplet stream from the gas flow, wherein the droplet stream is irradiated by laser to produce plasma and generate an extreme ultraviolet light. The shroud includes flow guide surface features that guide accumulated target material away from a collector mirror that reflects and focuses the EUL.

Abstract translation: 公开了一种极紫外光（EUL）源装置，该装置包括：设置有气流和液滴流的室; 目标材料通过该液滴发生器变成液滴流; 以及沿着液滴流定位的护罩，所述护罩屏蔽来自所述气流的液滴流，其中所述液滴流被激光照射以产生等离子体并产生极紫外光。 护罩包括引导表面特征，其引导累积的目标材料远离反射和聚焦EUL的收集器反射镜。