公开(公告)号：US09029252B2

公开(公告)日：2015-05-12

申请号：US14178566

申请日：2014-02-12

Applicant: Samsung Electronics Co., Ltd. ,  Unist Academy—Industry Research Corporation

Inventor： Un-jeong Kim ,  Jin-eun Kim ,  Young-geun Roh ,  Soo-jin Park ,  Yeon-sang Park ,  Seung-min Yoo ,  Chang-won Lee ,  Jae-soong Lee ,  Sang-mo Cheon

IPC: H01L21/22 ,  H01L21/38 ,  H01L21/4763 ,  H01L27/14 ,  H01L31/0224 ,  H01L21/283 ,  H01L31/028

CPC classification number: H01L31/022416 ,  G02B5/008 ,  H01L21/283 ,  H01L31/028 ,  H01L31/09 ,  Y02E10/547 ,  Y10S977/954

Abstract: A nanostructure, an optical device including the nanostructure, and methods of manufacturing the nanostructure and the optical device. A method of manufacturing a nanostructure may include forming a block copolymer template layer and a precursor pattern of metal coupled to the block copolymer template layer on a graphene layer, and forming a metal nanopattern on the graphene layer by removing the block copolymer template layer and reducing the precursor pattern.

Abstract translation: 纳米结构，包括纳米结构的光学器件，以及制造纳米结构和光学器件的方法。 制造纳米结构的方法可以包括在石墨烯层上形成嵌段共聚物模板层和耦合到嵌段共聚物模板层的金属前体图案，并且通过除去嵌段共聚物模板层和还原在石墨烯层上形成金属纳米图案 前体模式。