公开(公告)号：US20150053984A1

公开(公告)日：2015-02-26

申请号：US14518278

申请日：2014-10-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JEAN-HO SONG ,  Shin-Il Choi ,  Sun-Young Hong ,  Shi-Yul Kim ,  Ki-Yeup Lee ,  Jae-Hyoung Youn ,  Sung-Ryul Kim ,  O-Sung Seo ,  Yang-Ho Bae ,  Jong-Hyun Choung ,  Dong-Ju Yang ,  Bong-Kyun Kim ,  Hwa-Yeul Oh ,  Pil-Soon Hong ,  Byeong-Beom Kim ,  Je-Hyeong Park ,  Yu-Gwang Jeong ,  Jong-In Kim ,  Nam-Seok Suh

IPC: H01L27/12 ,  H01L29/45 ,  H01L29/423 ,  H01L29/786

CPC classification number: H01L27/124 ,  H01L27/12 ,  H01L27/1214 ,  H01L27/1288 ,  H01L29/42368 ,  H01L29/458 ,  H01L29/78669

Abstract: A thin film transistor array panel includes a gate line, a gate insulating layer that covers the gate line, a semiconductor layer that is disposed on the gate insulating layer, a data line and drain electrode that are disposed on the semiconductor layer, a passivation layer that covers the data line and drain electrode and has a contact hole that exposes a portion of the drain electrode, and a pixel electrode that is electrically connected to the drain electrode through the contact hole. The data line and drain electrode each have a double layer that includes a lower layer of titanium and an upper layer of copper, and the lower layer is wider than the upper layer, and the lower layer has a region that is exposed. The gate insulating layer may have a step shape.

Abstract translation: 薄膜晶体管阵列面板包括栅极线，覆盖栅极线的栅极绝缘层，设置在栅极绝缘层上的半导体层，设置在半导体层上的数据线和漏极，钝化层 覆盖数据线和漏电极，并且具有露出漏电极的一部分的接触孔，以及通过接触孔与漏电极电连接的像素电极。 数据线和漏极各自具有包括钛的下层和铜的上层的双层，下层比上层宽，下层具有暴露的区域。 栅极绝缘层可以具有台阶形状。