公开(公告)号：US09790586B2

公开(公告)日：2017-10-17

申请号：US14710738

申请日：2015-05-13

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Junhyeuk Ko ,  Daewon Baek ,  Eunji Lee

IPC: H01L51/00 ,  H01L21/00 ,  C23C14/04 ,  H01L27/32 ,  H01L51/52 ,  H01L51/56

CPC classification number: C23C14/042 ,  H01L27/3244 ,  H01L51/0011 ,  H01L51/5256 ,  H01L51/56

Abstract: A mask frame assembly includes a frame, and a mask tensioned on the frame in a first direction, the mask having a deposition pattern portion having a plurality of pattern holes therethrough, a deposition material being deposited on a substrate through the pattern holes, and a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in a second direction as a distance from the deposition pattern portion in the first direction increases, the second direction being oriented along a normal to the mask.