公开(公告)号：US20160314988A1

公开(公告)日：2016-10-27

申请号：US15203524

申请日：2016-07-06

Applicant: SAMSUNG DISPLAY CO., LTD ,  TERASEMICON CORPORATION

Inventor： Sung Guk An ,  Jun Heo ,  Jong Hyun Yun ,  Kyoung Wan Park ,  Ho Young Kang ,  Byung Il Lee

IPC: H01L21/324 ,  F27B17/00 ,  H01L21/67

CPC classification number: H01L21/324 ,  F27B17/0025 ,  H01L21/67109 ,  H01L21/67115

Abstract: Substrate heat treatment apparatus and method are provided. According to an embodiment of the present invention, there is provided a substrate heat treatment apparatus including an inner shell configured to form a substrate housing space to house at least one substrate, an outer shell configured to cover the inner shell, and having at least one gas hole, and at least one heater configured to heat the substrate, wherein the at least one gas hole is configured to allow a first gas to be injected into a space between the inner shell and the outer shell.

Abstract translation: 提供基板热处理装置和方法。 根据本发明的实施例，提供了一种基板热处理设备，其包括：内壳，其构造成形成用于容纳至少一个基板的基板容纳空间;外壳，构造成覆盖所述内壳，并且具有至少一个 气体孔和至少一个加热构造成加热基底的加热器，其中所述至少一个气孔被配置为允许第一气体被注入到所述内壳和所述外壳之间的空间中。

公开(公告)号：US20150368785A1

公开(公告)日：2015-12-24

申请号：US14637222

申请日：2015-03-03

Applicant: Samsung Display Co., Ltd.

Inventor： Kie Hyun Nam ,  Hye Dong Kim ,  Sung Guk An

IPC: C23C14/04 ,  H01L51/56

CPC classification number: C23C14/042 ,  B32B3/266 ,  B32B37/025 ,  B32B38/10 ,  C23C14/50 ,  C23C16/042 ,  G03F1/14 ,  G03F1/16 ,  G03F1/50 ,  G03F1/60 ,  G03F1/64 ,  G03F1/68 ,  H01L27/3223 ,  H01L51/0011 ,  H01L51/56

Abstract: A mask frame assembly for manufacturing a display device, and a method of manufacturing the mask frame assembly are disclosed. In one aspect, the mask frame assembly includes a frame having at least one opening portion defined therein. The mask frame assembly further includes a polymer film having a plurality of slits defined therein and combined to the frame.

Abstract translation: 公开了一种用于制造显示装置的面罩框架组件以及制造面罩框架组件的方法。 一方面，面罩框架组件包括具有限定在其中的至少一个开口部分的框架。 面罩框架组件还包括具有限定在其中并与框架组合的多个狭缝的聚合物膜。