公开(公告)号：US20210255019A1

公开(公告)日：2021-08-19

申请号：US16994001

申请日：2020-08-14

Applicant: Samsung Display Co., Ltd.

Inventor： Jeongwon HAN

IPC: G01F22/00 ,  G01B11/30 ,  G06T7/62 ,  G06T7/00

Abstract: An apparatus for manufacturing a display apparatus includes at least one test table on which a droplet is disposed, at least one profile measurement portion disposed adjacent to the at least one test table to measure a surface profile of the at least one test table and a surface profile of the droplet disposed on the at least one test table, and a controller electrically connected to the at least one profile measurement portion to measure a volume of the droplet from a difference between the surface profile of the at least one test table and the surface profile of the droplet disposed on the at least one test table.

公开(公告)号：US20170106391A1

公开(公告)日：2017-04-20

申请号：US15172093

申请日：2016-06-02

Applicant: Samsung Display Co., Ltd.

Inventor： Jeongwon HAN

IPC: B05B15/04 ,  B25B5/02

CPC classification number: B05B12/20 ,  B05B12/24 ,  B05B12/29 ,  B25B5/006 ,  B25B5/087 ,  Y10T29/49863 ,  Y10T29/49867

Abstract: A clamping apparatus includes a clamping frame, a first guide, a clamp, a linear driver, and a pressure sensor. The first guide is disposed on the clamping frame. The clamp is slideably engaged with the first guide, the clamp being configured to linearly move along the first guide to adjust a distance between the clamp and the clamping frame. The linear driver is connected to the clamp, the linear driver being configured to cause, at least in part, linear motion of the clamp. The pressure sensor is configured to sense pressure applied to an object clamped between the clamp and the clamping frame.

公开(公告)号：US20160301036A1

公开(公告)日：2016-10-13

申请号：US14943619

申请日：2015-11-17

Applicant: Samsung Display Co., Ltd.

Inventor： Jeongwon HAN

IPC: H01L51/56 ,  C23C16/48 ,  H01L51/00

CPC classification number: H01L51/56 ,  C23C14/04 ,  C23C14/042 ,  C23C14/12 ,  H01L51/0009 ,  H01L51/0011

Abstract: A deposition device including a chamber configured to accommodate a substrate supported on a stage, a deposition source configured to discharge material toward the substrate, and a laser mask system configured to form a laser mask between the substrate and the stage.

Abstract translation: 一种沉积装置，包括：腔室，被配置为容纳支撑在载物台上的基底;沉积源，被配置为朝向所述基底排出材料;以及激光掩模系统，被配置为在所述基底和所述载物台之间形成激光掩模。

公开(公告)号：US20140209025A1

公开(公告)日：2014-07-31

申请号：US14012917

申请日：2013-08-28

Applicant: Samsung Display Co., Ltd.

Inventor： Jeongwon HAN

IPC: H01L51/56

CPC classification number: C23C14/042 ,  C23C8/04 ,  C23C10/04 ,  C23C14/04 ,  C23C16/04 ,  C23C16/042 ,  C23C18/06 ,  C30B25/04 ,  H01L51/0011

Abstract: A deposition apparatus includes a deposition chamber, a deposition source, and a deposition mask. The deposition source is disposed in the deposition chamber and provides a deposition material to a deposition substrate. The deposition mask includes a body portion and a carbon layer. The carbon layer is disposed on a first surface making contact with the deposition mask and includes at least one of carbon nanotube or graphene.

Abstract translation: 沉积设备包括沉积室，沉积源和沉积掩模。 沉积源设置在沉积室中并将沉积材料提供给沉积基板。 沉积掩模包括主体部分和碳层。 碳层设置在与沉积掩模接触的第一表面上，并且包括碳纳米管或石墨烯中的至少一种。