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公开(公告)号：US20180126413A1
公开(公告)日：2018-05-10
申请号：US15865679
申请日：2018-01-09
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Jae Hoon HWANG , Kwan Hee LEE
IPC: B05D1/00
CPC classification number: B05D1/60 , C23C14/24 , H01L51/001
Abstract: A deposition apparatus includes an effusion cell, a guide rail, and a cooling channel. The effusion cell extends in a first direction. The guide rail is below the effusion cell and extends in a second direction. The cooling channel is below an upper surface of the guide rail and extends in the second direction.
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