公开(公告)号：US20240131555A1

公开(公告)日：2024-04-25

申请号：US18234937

申请日：2023-08-16

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  EUIGYU KIM ,  SUKHA RYU ,  YOUNGSUN CHO

IPC: B05C13/02 ,  B05C21/00 ,  H01L21/683 ,  H10K71/16

CPC classification number: B05C13/02 ,  B05C21/005 ,  H01L21/6833 ,  H10K71/166

Abstract: A deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. The support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.

公开(公告)号：US20240093346A1

公开(公告)日：2024-03-21

申请号：US18468172

申请日：2023-09-15

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  JONGSUNG PARK ,  Sukha RYU ,  SEUNGJU HONG

IPC: C23C14/04 ,  C23C14/24

CPC classification number: C23C14/042 ,  C23C14/24

Abstract: A mask assembly includes a mask, a frame having an external portion surrounding an opening, a mask fixing portion including a long-side stick and a short-side stick for fixing the mask, and a height correcting member connecting the mask fixing portion and the external portion of the frame.

公开(公告)号：US20220018011A1

公开(公告)日：2022-01-20

申请号：US17195771

申请日：2021-03-09

Applicant: Samsung Display Co., LTD.

Inventor： JUNHYEUK KO ,  BYUNG IK KONG ,  SEIL KIM ,  EUIGYU KIM ,  SOOHYUN MIN ,  SANG MIN YI ,  WONYOUNG JANG ,  SEUNGJU HONG

IPC: C23C14/04 ,  C23C16/04

Abstract: A mask assembly includes a mask frame including an edge portion including opposing upper and lower portions along a first direction, and a support which between the upper portion and the lower portion of the edge portion along the first direction; and a mask attachable to the mask frame. The mask includes a pattern area corresponding to the support and including a first welded area at which the mask is attachable to the support, an alignment adjustment pattern adjacent to the first welded area along the first direction, and a second thickness of the mask at the alignment adjustment pattern which is less than a first thickness of the mask at the first welded area, and a first deposition area including upper deposition openings of the mask and between the upper portion and the support of the mask frame.