公开(公告)号：US20250044627A1

公开(公告)日：2025-02-06

申请号：US18919835

申请日：2024-10-18

Applicant: STMicroelectronics (Crolles 2) SAS

Inventor： Sébastien Cremer

IPC: G02F1/1333 ,  G02B6/13 ,  G02F1/01

Abstract: A method includes forming a layer made of a first insulating material on a first layer made of a second insulating material that covers a support, defining a waveguide made of the first material in the layer of the first material, covering the waveguide made of the first material with a second layer of the second material, planarizing an upper surface of the second layer of the second material, and forming a single-crystal silicon layer over the second layer.

公开(公告)号：US11947202B2

公开(公告)日：2024-04-02

申请号：US18295121

申请日：2023-04-03

Applicant: STMicroelectronics (Crolles 2) SAS

Inventor： Sébastien Cremer ,  Frédéric Boeuf ,  Stephane Monfray

IPC: G02F1/01 ,  G02B6/12 ,  G02F1/035

CPC classification number: G02F1/035 ,  G02B6/12004 ,  G02F1/0147 ,  G02F2201/063

Abstract: The present disclosure relates to a method including the following steps: a) forming a waveguide from a first material, the waveguide being configured to guide an optical signal; b) forming a layer made of a second material that is electrically conductive and transparent to a wavelength of the optical signal, steps a) and b) being implemented such that the layer made of the second material is in contact with at least one of the faces of the waveguide, or is separated from the at least one of the faces by a distance of less than half, preferably less than a quarter, of the wavelength of the optical signal. The application further relates to a phase modulator, in particular obtained by such a method.