公开(公告)号：US20240418981A1

公开(公告)日：2024-12-19

申请号：US18813478

申请日：2024-08-23

Applicant: SEIKO EPSON CORPORATION

Inventor： Tomonori MATSUSHITA ,  Nozomu HIROKUBO

IPC: G02B26/00 ,  G01J3/02 ,  G01J3/06 ,  G01J3/10 ,  G01J3/26 ,  G01J3/28 ,  G01J3/32 ,  G01J3/42 ,  G01J3/50

Abstract: An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.

公开(公告)号：US20210263298A1

公开(公告)日：2021-08-26

申请号：US17314553

申请日：2021-05-07

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA ,  Nozomu HIROKUBO

IPC: G02B26/00 ,  G01J3/28 ,  G01J3/26 ,  G01J3/02 ,  G01J3/06 ,  G01J3/10 ,  G01J3/32 ,  G01J3/42 ,  G01J3/50

Abstract: An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.

公开(公告)号：US20160363760A1

公开(公告)日：2016-12-15

申请号：US14339731

申请日：2014-07-24

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA ,  Masashi KANAI

IPC: G02B26/00 ,  G01J3/26 ,  G02B5/28

CPC classification number: G02B26/001 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/30 ,  G01J3/36 ,  G01J3/44 ,  G01J3/46 ,  G01J2003/2826 ,  G02B5/288

Abstract: An optical module includes a variable wavelength interference filter configured to transmit light including peak wavelengths corresponding to a gap dimension between a pair of reflection films and corresponding to a plurality of orders and first to third dichroic mirrors configured to separate light in a predetermined wavelength band and lights in wavelength bands other than the predetermined wavelength band. The plurality of first to third dichroic mirrors respectively correspond to different orders and are arranged in order such that the peak wavelengths corresponding to the orders are included in the predetermined wavelength band and transmitted light of the variable wavelength interference filter is made incident on the first dichroic mirror, second separated light of the first dichroic mirror is made incident on the second dichroic mirror, and second separated light of the second dichroic mirror is made incident on the third dichroic mirror.

Abstract translation: 光学模块包括可变波长干涉滤光器，该可变波长干涉滤光器被配置为透射包括对应于一对反射膜之间的间隙尺寸的峰值波长并且对应于多个阶数的光，以及被配置为分离预定波长带中的光的第一至第三分色镜，以及 在除了预定波长带之外的波长带中发光。 多个第一至第三分色镜分别对应于不同的顺序，并且按照顺序排列，使得与预定波长相对应的峰值波长被包括在预定波长带中，并且将可变波长干涉滤光器的透射光入射到第一二向色 反射镜，第一分色镜的第二分离光入射在第二分色镜上，第二分色镜的第二分离光入射在第三分色镜上。

公开(公告)号：US20140320854A1

公开(公告)日：2014-10-30

申请号：US14325923

申请日：2014-07-08

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA ,  Tatsuo URUSHIDANI

IPC: G02B26/00 ,  G01J3/26

CPC classification number: G02B26/001 ,  G01J3/26

Abstract: An Etalon filter includes a first substrate, a second substrate which faces the first substrate, a first optical film which is provided on the first substrate, and a second optical film which is provided on the second substrate to face the first optical film. The reflective characteristic of the first optical film determined by the reflectance of light of each wavelength in a reflective band is different from the reflective characteristic of the second optical film determined by the reflectance of light of each wavelength in the reflective band. The first optical film can have a reflective characteristic with a first wavelength λ1 as a center wavelength, and the second optical film can have a reflective characteristic with a second wavelength λ2 different from the first wavelength as a center wavelength.

Abstract translation: Etalon滤光器包括第一基板，面向第一基板的第二基板，设置在第一基板上的第一光学膜和设置在第二基板上以面对第一光学膜的第二光学膜。 由反射带中的每个波长的光的反射率确定的第一光学膜的反射特性与由反射带中的每个波长的光的反射率确定的第二光学膜的反射特性不同。 第一光学膜可以具有第一波长λ1作为中心波长的反射特性，并且第二光学膜可以具有不同于第一波长的第二波长λ2作为中心波长的反射特性。

公开(公告)号：US20140240708A1

公开(公告)日：2014-08-28

申请号：US14187990

申请日：2014-02-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Tomonori MATSUSHITA ,  Akira SANO

IPC: G01J3/51 ,  G09G5/02

CPC classification number: G01J3/51 ,  G01J3/26 ,  G01J3/462

Abstract: A communication system includes a transmission terminal for displaying a color code having a plurality of colors of code patterns arranged two-dimensionally, and a spectroscopic measurement device including a variable wavelength interference filter for dispersing the light from the image displayed on the transmission terminal, an imaging section adapted to image the light dispersed by the variable wavelength interference filter to obtain a spectral image, a colorimetric section adapted to measure a dispersion spectrum of each of pixels in each of spectral images of a plurality of wavelengths with respect to the color code based on the light intensity value in each of the pixels, in the case in which the spectral images are obtained, and a decode section adapted to detect an arrangement of the code patterns based on the pixel positions and the dispersion spectrums of the respective pixels, and decode the color code.

Abstract translation: 一种通信系统包括：发送端子，用于显示具有二维布置的多种颜色的码型的色码;以及分光测量装置，包括用于分散来自显示在传送终端上的图像的光的可变波长干涉滤光器， 成像部分，其适于对由可变波长干涉滤光器分散的光进行成像以获得光谱图像;比色部分，适于测量相对于基于颜色代码的多个波长的每个光谱图像中的每个像素的色散谱 对于获得了分光图像的情况下的每个像素的光强值，以及适于基于像素的像素位置和色散谱来检测码图案的排列的解码部分，以及 解码颜色代码。

公开(公告)号：US20140071445A1

公开(公告)日：2014-03-13

申请号：US14025050

申请日：2013-09-12

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA ,  Nozomu Hirokubo

IPC: G02B26/00 ,  G01J3/28

CPC classification number: G02B26/001 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/0291 ,  G01J3/06 ,  G01J3/10 ,  G01J3/26 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/32 ,  G01J3/42 ,  G01J3/50

Abstract: An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.

Abstract translation: 光学模块包括具有固定反射膜的波长可变干涉滤光器，面对固定反射膜的可移动反射膜，其间插入反射膜之间的间隙，以及改变反射膜之间的间隙的静电致动器，以及间隙控制 控制静电执行器的单元。 间隙控制单元基于根据要测量的波长设置的顺序来控制静电致动器，并且改变反射膜之间的间隙。

公开(公告)号：US20220206284A1

公开(公告)日：2022-06-30

申请号：US17558063

申请日：2021-12-21

Applicant: SEIKO EPSON CORPORATION

Inventor： Tomonori MATSUSHITA

IPC: G02B26/00 ,  G02B5/26

Abstract: The wavelength variable optical filter includes a first substrate, a second substrate, and a bonding film, the bonding film is in contact with a first reflective film and a second reflective film to thus join the first substrate with the second substrate, the bonding film has transparency with respect to light of a predetermined wavelength range, and an optical path extending through the first reflective film, the bonding film, and the second reflective film has transparency with respect to light of the predetermined wavelength range and has no peak of transmittance with respect to a wavelength range measured by the wavelength variable filter.

公开(公告)号：US20160037141A1

公开(公告)日：2016-02-04

申请号：US14813472

申请日：2015-07-30

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA

IPC: H04N9/04

CPC classification number: G01J3/0213 ,  G01J3/0256 ,  G01J3/26 ,  G01J2003/2813 ,  G01J2003/2826

Abstract: A spectral camera includes a wavelength variable interference filter, an imaging unit having a plurality of light receiving elements arranged in a two-dimensional array configuration, and a wavelength acquisition unit which acquires center wavelengths of light beams received by the light receiving elements in accordance with signal values output from the light receiving elements when reference light is received by the imaging unit. Light amounts of the reference light corresponding to different wavelength components in a certain wavelength range are uniform in a plane, and different signal values are acquired when light beams of the different wavelength components are received by the light receiving elements.

Abstract translation: 光谱相机包括波长可变干涉滤光器，具有以二维阵列配置布置的多个光接收元件的成像单元和波长获取单元，其获取由光接收元件接收的光束的中心波长 当由成像单元接收参考光时从光接收元件输出的信号值。 对应于一定波长范围的不同波长分量的参考光的光量在平面内是均匀的，并且当由光接收元件接收不同波长分量的光束时，获得不同的信号值。

公开(公告)号：US20140268343A1

公开(公告)日：2014-09-18

申请号：US14300448

申请日：2014-06-10

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA

IPC: G02B26/00

CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B6/29346 ,  G02B6/29395

Abstract: A light filter has a first reflecting film and a second reflecting film opposed to each other, a first electrode, a second electrode, a third electrode, a fourth electrode, and a potential difference control unit, the first electrode and the third electrode are opposed at a first distance, the second electrode and the fourth electrode are opposed at a second distance different from the first distance, the potential difference control unit brings the first electrode and the third electrode into contact by producing a potential difference between the first electrode and the third electrode and brings the second electrode and the fourth electrode into contact by producing a potential difference between the second electrode and the fourth electrode, and thereby, a gap between the first reflecting film and the second reflecting film may be controlled with high accuracy.

Abstract translation: 光滤波器具有彼此相对的第一反射膜和第二反射膜，第一电极，第二电极，第三电极，第四电极和电位差控制单元，第一电极和第三电极相对 在第一距离处，第二电极和第四电极在与第一距离不同的第二距离处相对，电位差控制单元通过产生第一电极和第三电极之间的电位差而使第一电极和第三电极接触 通过产生第二电极和第四电极之间的电位差使第二电极和第四电极接触，从而可以高精度地控制第一反射膜和第二反射膜之间的间隙。

公开(公告)号：US20140240711A1

公开(公告)日：2014-08-28

申请号：US14187437

申请日：2014-02-24

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA

IPC: G01B9/02 ,  G01J3/02

CPC classification number: G01J3/0205 ,  G01J3/0264 ,  G01J3/26 ,  G01J3/51 ,  G02B26/001

Abstract: A spectrometry device includes a wavelength-tunable interference filter that is provided with a stationary reflection film, a movable reflection film and an electrostatic actuator which changes a gap dimension between the stationary reflection film and the movable reflection film; a detector that receives incident light; a filter control unit that sets the gap dimension between the stationary reflection film and the movable reflection film to be a first dimension corresponding to light having a first wavelength which is smaller than that of a measurement target wavelength region; a cutoff filter that cuts off the light having a wavelength which is smaller than that of the measurement target wavelength region; and a light quantity acquisition unit that acquires the light quantity of stray light received by the detector when the gap dimension is changed to be the first dimension.

Abstract translation: 光谱测定装置包括具有静止反射膜的波长可调谐干涉滤光器，可移动反射膜和静电致动器，其改变固定反射膜和可移动反射膜之间的间隙尺寸; 接收入射光的检测器; 将所述固定反射膜和所述可动反射膜之间的间隙尺寸设定为与具有比所述测定对象波长范围小的第一波长的光对应的第一尺寸的滤光器控制单元; 截止滤波器，其切断具有比测量对象波长区域的波长小的波长的光; 以及光量获取单元，当所述间隙尺寸被改变为第一尺寸时，​​获取由所述检测器接收的杂散光的光量。