公开(公告)号：US09318311B2

公开(公告)日：2016-04-19

申请号：US13647680

申请日：2012-10-09

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Rajeev Patil

IPC: H01J61/52 ,  H01J61/28 ,  H01J65/04

CPC classification number: H01J61/526 ,  H01J61/28 ,  H01J65/04

Abstract: A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.

Abstract translation: 用于激光维持等离子体光源的可再填充等离子体单元包括等离子体灯泡，灯泡由对所选波长的辐射基本上透明的玻璃材料形成，气体端口组件可操作地连接到 所述灯泡并且设置在所述气体灯泡的第一部分处，其中所述灯泡构造成经由所述气体端口组件选择性地从气体源接收气体。