公开(公告)号：US20220066333A1

公开(公告)日：2022-03-03

申请号：US17446035

申请日：2021-08-26

Applicant: KLA Corporation

Inventor： Avner Safrani ,  Adi Pahima ,  Ron Rudoi ,  Shai Mark

IPC: G03F7/20

Abstract: A reticle inspection system and a method of handling a reticle in a reticle inspection system are provided. The reticle inspection system includes an active reticle carrier and an inspection tool. The reticle is disposed on the active reticle carrier, and the inspection tool is configured to determine an orientation of the reticle when the active reticle carrier is disposed on a reticle stage. The active reticle carrier is movable between a loading station and the reticle stage and is configured to rotate the reticle to reorient the reticle based on the orientation of the reticle while the active carrier is disposed on the reticle stage.