公开(公告)号：US20200266026A1

公开(公告)日：2020-08-20

申请号：US16788752

申请日：2020-02-12

Applicant: JEOL Ltd.

Inventor： Tomohiro Haruta ,  Yuta Ikeda

IPC: H01J37/22 ,  G02B21/36 ,  H01J37/244 ,  G02B21/10 ,  H01J37/26

Abstract: An observation method includes: preparing a specimen including, as a mark a plurality of metal particles in which localized surface plasmon resonance is excited by irradiation with light; acquiring an optical microscope image by photographing the specimen with an optical microscope; acquiring an electron microscope image by photographing the specimen with an electron microscope; acquiring information of the positions and the colors of the plurality of metal particles in the optical microscope image; acquiring information of the positions and the particle diameters of the plurality of metal particles in the electron microscope image; and determining information for associating the optical microscope image and the electron microscope image based on the information of the positions and the colors of the plurality of metal particles acquired from the optical microscope image, and the information of the positions and the particle diameters of the plurality of metal particles acquired from the electron microscope image.