公开(公告)号：US10950412B2

公开(公告)日：2021-03-16

申请号：US16788752

申请日：2020-02-12

Applicant: JEOL Ltd.

Inventor： Tomohiro Haruta ,  Yuta Ikeda

IPC: H01J37/22 ,  G02B21/10 ,  G02B21/36 ,  H01J37/244 ,  H01J37/26

Abstract: An observation method includes: preparing a specimen including, as a mark a plurality of metal particles in which localized surface plasmon resonance is excited by irradiation with light; acquiring an optical microscope image by photographing the specimen with an optical microscope; acquiring an electron microscope image by photographing the specimen with an electron microscope; acquiring information of the positions and the colors of the plurality of metal particles in the optical microscope image; acquiring information of the positions and the particle diameters of the plurality of metal particles in the electron microscope image; and determining information for associating the optical microscope image and the electron microscope image based on the information of the positions and the colors of the plurality of metal particles acquired from the optical microscope image, and the information of the positions and the particle diameters of the plurality of metal particles acquired from the electron microscope image.

公开(公告)号：US20200371331A1

公开(公告)日：2020-11-26

申请号：US16879904

申请日：2020-05-21

Applicant: JEOL Ltd.

Inventor： Yuta Ikeda ,  Tomohiro Haruta ,  Katsunori Ichikawa ,  Tomohisa Fukuda ,  Yuji Konyuba

IPC: G02B21/00 ,  G02B21/36 ,  G06K9/00

Abstract: An image processing method includes: acquiring an optical microscope image of a specimen; acquiring a transmission electron microscope image of the specimen having been thinned; and superimposing the optical microscope image on the transmission electron microscope image and causing a display section to display the superimposed images, and in superimposing the optical microscope image on the transmission electron microscope image and causing the display section to display the superimposed images, the optical microscope image is distorted to match a field of view of the optical microscope image with a field of view of the transmission electron microscope image.