公开(公告)号：US08368885B2

公开(公告)日：2013-02-05

申请号：US12377300

申请日：2008-06-05

Applicant: Katsumi Shibayama ,  Helmut Teichmann ,  Tomofumi Suzuki ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Katsumi Shibayama ,  Helmut Teichmann ,  Tomofumi Suzuki ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/2803

Abstract: In the spectroscopy module 1, a light detecting element 4 is provided with a light passing opening 4b through which light made incident into a body portion 2 passes. Therefore, it is possible to prevent deviation of the relative positional relationship between the light passing opening 4b and a light detection portion 4a of the light detecting element 4. Further, an optical element 7, which guides light made incident into the body portion 2, is arranged at the light passing opening 4b. Therefore, light, which is to be made incident into the body portion 2, is not partially blocked at a light incident edge portion of the light passing opening 4b, but light, which is to be made incident into the body portion 2, can be guided securely. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.

Abstract translation: 在光谱模块1中，光检测元件4设置有入射到主体部分2中的光通过的光通过开口4b。 因此，能够防止光通过口4b与光检测元件4的光检测部4a之间的相对位置关系的偏差。此外，引导入射到主体部2的光的光学元件7， 布置在光通过开口4b处。 因此，入射到主体部分2中的光在光通过开口4b的光入射边缘部分处不被部分地阻挡，而入射到主体部分2中的光可以是 引导安全。 因此，根据光谱模块1，可以提高可靠性。

公开(公告)号：US08068224B2

公开(公告)日：2011-11-29

申请号：US12377325

申请日：2008-06-05

Applicant: Katsumi Shibayama ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Katsumi Shibayama ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/28

CPC classification number: G01J3/04 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/18 ,  G01J3/2803

Abstract: In the spectroscopy module 1, a light absorbing layer 6 having a light-passing hole 6a through which light L1 advancing into a spectroscopic portion 3 passes and a light-passing hole 6b through which light L2 advancing into a light detecting portion 4a of a light detecting element 4 passes is integrally formed by patterning. Therefore, it is possible to prevent deviation of the relative positional relationship between the light-passing hole 6a and the light-passing hole 6b. Further, since the occurrence of stray light is suppressed by the light absorbing layer 6 and the stray light is absorbed, the light detecting portion 4a of the light detecting element 4 can be suppressed from being made incident. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.

Abstract translation: 在光谱模块1中，具有通过光入射到分光部3的光L1通过的光通过孔6a的光吸收层6和通过光进入光的光检测部4a的光通过孔6b 检测元件4通过图案化一体地形成。 因此，可以防止通光孔6a和通光孔6b之间的相对位置关系的偏差。 此外，由于光吸收层6抑制了杂散光的发生，并且杂散光被吸收，所以能够抑制光检测元件4的光检测部4a的入射。 因此，根据光谱模块1，可以提高可靠性。

公开(公告)号：US08049887B2

公开(公告)日：2011-11-01

申请号：US12377314

申请日：2008-06-05

Applicant: Tomofumi Suzuki ,  Katsumi Shibayama ,  Takafumi Yokino ,  Masashi Ito ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Tomofumi Suzuki ,  Katsumi Shibayama ,  Takafumi Yokino ,  Masashi Ito ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/02 ,  G01J3/04 ,  G01J3/18

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/04

Abstract: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of to the light detecting element 4 to transmit the light L1, L2.

Abstract translation: 光谱分析模块1设置有用于透射光L1，L2的主体部分2，用于将从主体部分2的前面平面2a入射的光L1分散到主体部分2中以将光反射到前面的光谱部分3 平面2a，光检测元件4，具有光检测部分41，用于检测由分光部分3分散和反射的光L2，并通过面朝下的接合电连接到形成在主体部分2的前平面2a上的布线9; 以及填充到光检测元件4的主体部分2侧的底部填充材料12以透射光L1，L2。

公开(公告)号：US20100201980A1

公开(公告)日：2010-08-12

申请号：US12377325

申请日：2008-06-05

Applicant: Katsumi Shibayama ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Katsumi Shibayama ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/28

CPC classification number: G01J3/04 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/18 ,  G01J3/2803

Abstract: In the spectroscopy module 1, a light absorbing layer 6 having a light-passing hole 6a through which light L1 advancing into a spectroscopic portion 3 passes and a light-passing hole 6b through which light L2 advancing into a light detecting portion 4a of a light detecting element 4 passes is integrally formed by patterning. Therefore, it is possible to prevent deviation of the relative positional relationship between the light-passing hole 6a and the light-passing hole 6b. Further, since the occurrence of stray light is suppressed by the light absorbing layer 6 and the stray light is absorbed, the light detecting portion 4a of the light detecting element 4 can be suppressed from being made incident. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.

Abstract translation: 在光谱模块1中，具有通过光入射到分光部3的光L1通过的光通过孔6a的光吸收层6和通过光进入光的光检测部4a的光通过孔6b 检测元件4通过图案化一体地形成。 因此，可以防止通光孔6a和通光孔6b之间的相对位置关系的偏差。 此外，由于光吸收层6抑制了杂散光的发生，并且杂散光被吸收，所以能够抑制光检测元件4的光检测部4a的入射。 因此，根据光谱模块1，可以提高可靠性。

公开(公告)号：US20070211250A1

公开(公告)日：2007-09-13

申请号：US11596066

申请日：2005-07-08

Applicant: Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/28

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/18

Abstract: A spectrometer 1A is made up of: an optical body 10 within which a light separation path is set along which an object light to be separated propagates; a light entry slit 16 through which the object light enters; a diffraction grating 17 for spectrally separating the incident object light; and a photodiode array 18 for detecting the object light separated by the diffraction grating 17. As an optical member for optically interconnecting the optical body 10 and the photodiode array 18, an optical connection member 20 is provided, with its light entry surface 21 for the separated object light in contact with the upper surface 11 of the optical body 10, with its light exit surface 22 in contact with the photodiode array 18, with the light exit surface 22 tilted by a specified angle relative to the light entry surface 21. Thus, the spectrometer capable of bringing about sufficient accuracy of placing optical elements in a simple constitution while bringing down cost is realized.

Abstract translation: 光谱仪1A由以下部分组成：光学体10，其中设置光分离路径，待分离的物体沿着该光分离路径传播; 物体光进入的光入口狭缝16; 用于光谱分离入射物体光的衍射光栅17; 以及用于检测由衍射光栅17分离的物体光的光电二极管阵列18。 作为将光学体10与光电二极管阵列18进行光学互连的光学构件，设有光学连接构件20，其分离物体的光入射面21与光学体10的上表面11接触， 其光出射表面22与光电二极管阵列18接触，光出射表面22相对于光入射表面21倾斜一定角度。 因此，实现了能够以简单的结构将光学元件放置在足够的精度下，同时降低成本的光谱仪。

公开(公告)号：US07081955B2

公开(公告)日：2006-07-25

申请号：US10854628

申请日：2004-05-27

Applicant: Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/18 ,  G01J3/28

CPC classification number: G01J3/2803 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0291

Abstract: A spectrometer is configured by using a photodetector 1B which comprises a semiconductor substrate 10 having an upper surface 10a, a photodiode array 11 having a plurality of photodiodes 12 aligned on the upper surface 10a of the substrate 10, and a light input section 13 including an opening formed in a predetermined positional relationship to the photodiode array 11; and a main body 2 having a plate portion 20 and support portions 21 and 22 mounted on the substrate 10 of the photodetector 1B. The spectrometer is provided with a lens 23 protruded from a lower face 20b of the plate portion 20 and a planar aberration-reduced blazed reflection diffraction grating 24 provided on an upper face 20a of the plate portion 20 for separating incident light having entered through the light input section 13 and passed through the lens 23 into its spectral components, and configured to detect the spectral components with the photodiode array 11. Thus, a photodetector capable of improving the positioning accuracy of components when it is applied to a spectrometer and the spectrometer using the same are realized.

Abstract translation: 通过使用光电检测器1B来配置光谱仪，该光电检测器1B包括具有上表面10a的半导体衬底10，具有在衬底10的上表面10a上排列的多个光电二极管12的光电二极管阵列11，以及光输入部 13包括以与光电二极管阵列11的预定位置关系形成的开口; 以及具有安装在光电检测器1B的基板10上的板部分20和支撑部分21和22的主体2.光谱仪设置有从板部分20的下表面20b突出的透镜23， 设置在板部分20的上表面上的像差减少的闪光反射衍射光栅24，用于分离入射到光输入部分13中并通过透镜23的入射光成为其光谱分量，并且被配置为检测光谱分量 与光电二极管阵列11。 因此，实现了当将其应用于光谱仪时能够提高部件的定位精度的光电检测器以及使用其的光谱仪。

公开(公告)号：US08045160B2

公开(公告)日：2011-10-25

申请号：US13086065

申请日：2011-04-13

Applicant: Katsumi Shibayama ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Katsumi Shibayama ,  Takafumi Yokino ,  Tomofumi Suzuki ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/02 ,  G01J3/18

CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0259 ,  G01J3/0291

Abstract: Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.

Abstract translation: 对准标记12a，12b，12c和12d形成在与衍射层8一体形成的周缘部分11的平面11a上，并且当透镜部分7安装到基板2上时，这些对准标记12a，12b ，12c和12d位于基板2上，从而使衍射层8相对于光检测元件4的光检测部分4a精确对准，例如不依赖于透镜的曲率半径的差异 特别地，对准标记12a，12b，12c和12d形成在平面11a上，由此，图像识别被精确地检测对准标记12a，12b，12c和12d的位置，从而可以 准确对齐。

公开(公告)号：US08045155B2

公开(公告)日：2011-10-25

申请号：US12377343

申请日：2008-06-05

Applicant: Tomofumi Suzuki ,  Katsumi Shibayama ,  Takafumi Yokino ,  Masashi Ito ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Tomofumi Suzuki ,  Katsumi Shibayama ,  Takafumi Yokino ,  Masashi Ito ,  Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/26

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/04

Abstract: The spectroscopy module is provided with a body portion for transmitting light, a spectroscopic portion for dispersing light made incident from the front plane of the body portion into the body portion to reflect the light on the front plane, a light detecting element having a light detecting portion for detecting the light dispersed and reflected by the spectroscopic portion and electrically connected to a wiring formed on the front plane of the body portion by face-down bonding, and an underfill material filled in the body portion side of the light detecting element to transmit the light. The light detecting element is provided with a light-passing hole through which the light advancing into the spectroscopic portion passes, and a reservoir portion is formed on a rear plane of the body portion side in the light detecting element so as to enclose a light outgoing opening of the light-passing hole.

Abstract translation: 光谱模块设置有用于透射光的主体部分，用于将从主体部分的前平面入射的光分散到主体部分中以将光反射到前平面上的光谱部分，具有光检测的光检测元件 用于检测由分光部分分散和反射的光并通过面朝下接合与形成在主体部分的前平面上的布线电连接的光;以及填充在光检测元件的主体部分侧的底部填充材料， 光。 光检测元件设置有通向分光部分的光通过的通光孔，并且在光检测元件中的主体部分侧的后平面上形成储存部分，以便包围光出射 打开通光孔。

公开(公告)号：US07605917B2

公开(公告)日：2009-10-20

申请号：US11596066

申请日：2005-07-08

Applicant: Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

Inventor： Helmut Teichmann ,  Dietmar Hiller ,  Ulrich Starker

IPC: G01J3/18

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/18

Abstract: A spectrometer 1A is made up of: an optical body 10 within which a light separation path is set along which an object light to be separated propagates; a light entry slit 16 through which the object light enters; a diffraction grating 17 for spectrally separating the incident object light; and a photodiode array 18 for detecting the object light separated by the diffraction grating 17. As an optical member for optically interconnecting the optical body 10 and the photodiode array 18, an optical connection member 20 is provided, with its light entry surface 21 for the separated object light in contact with the upper surface 11 of the optical body 10, with its light exit surface 22 in contact with the photodiode array 18, with the light exit surface 22 tilted by a specified angle relative to the light entry surface 21. Thus, the spectrometer capable of bringing about sufficient accuracy of placing optical elements in a simple constitution while bringing down cost is realized.

Abstract translation: 光谱仪1A由以下部分组成：光学体10，其中设置有光分离路径，待分离的物体沿着该光分离路径传播; 物体光进入的光入口狭缝16; 用于光谱分离入射物体光的衍射光栅17; 以及用于检测由衍射光栅17分离的物体光的光电二极管阵列18.作为用于光学互连光学体10和光电二极管阵列18的光学构件，设置有光学连接构件20，其光入射表面21用于 分离的物体光与光学体10的上表面11接触，其光出射表面22与光电二极管阵列18接触，光出射表面22相对于光入射表面21倾斜一定的角度。因此 能够实现能够以简单的结构放置光学元件的足够精度的光谱仪，同时降低成本。

公开(公告)号：US20090135420A1

公开(公告)日：2009-05-28

申请号：US12066546

申请日：2005-09-22

Applicant: Dietmar Hiller ,  Helmut Teichmann ,  Ulrich Starker

Inventor： Dietmar Hiller ,  Helmut Teichmann ,  Ulrich Starker

IPC: G01J3/00

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/0259 ,  G01J3/0289 ,  G01J3/0291

Abstract: A spectrometer 1A is constituted with an optical body 10, a glass member 11 formed with a light entry slit 12, and a connecting flange 20. The connecting flange 20 is provided with an opening 21 to which the glass member 11 is positioned and inserted, and with positioning rods 25 provided in positions in front of and behind the opening 21 as positioned relative to the opening 21. Using the positioning rods 25, when the spectrometer 1A is applied to the measuring apparatus, makes it possible to connect the spectrometer 1A and other components of the measuring apparatus through a passive alignment method simply with high accuracy. Thus, a spectrometer capable of favorably achieving optical connection to light to be optically separated and a measuring apparatus using the spectrometer can be realized.

Abstract translation: 光谱仪1A由光学体10，形成有光入口狭缝12的玻璃构件11和连接凸缘20构成。连接凸缘20设置有玻璃构件11定位和插入的开口21， 并且定位杆25设置在相对于开口21定位的开口21的前方和后方的位置。使用定位杆25，当将光谱仪1A应用于测量装置时，可以将光谱仪1A和 测量装置的其他部件通过无源对准方法简单地具有高精度。 因此，可以实现能够有利地实现与光分离的光的光学连接的光谱仪和使用光谱仪的测量装置。