OPTICAL DEVICE
    11.
    发明申请

    公开(公告)号:US20220342206A1

    公开(公告)日:2022-10-27

    申请号:US17763285

    申请日:2020-09-09

    Abstract: In an optical device, a mirror surface is provided in a movable portion. A support portion supports the movable portion through an elastic connection portion. A force generator generates force in the movable portion. A drive controller outputs a drive signal that operates the force generator. The movable portion has a resonance frequency higher than a frequency of the drive signal output from the drive controller in a state before the elastic connection portion is heated. The movable portion swings due to the elastic deformation of the elastic connection portion in response to the force of the force generator. A heat controller acquires a signal that indicates a swing state of the movable portion and performs, based on a phase of the acquired signal, feedback control of heating of the elastic connection portion by a heater.

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