公开(公告)号：US20150144809A1

公开(公告)日：2015-05-28

申请号：US14611914

申请日：2015-02-02

Applicant: GIGAPHOTON INC.

Inventor： Shinji OKAZAKI ,  Takanobu ISHIHARA ,  Yutaka SHIRAISHI

IPC: H05G2/00

CPC classification number: H05G2/006 ,  H05G2/005 ,  H05G2/008

Abstract: A target supply device may include: a tank including a storage portion that stores a target material and a supply portion that is in communication with the storage portion, the target material flowing into the supply portion; a nozzle including a nozzle hole that is in communication with the supply portion to be fed with the target material; and a coating portion that covers a wall surface of the nozzle hole.

Abstract translation: 目标供给装置可以包括：储存器，包括存储目标材料的存储部分和与所述存储部分连通的供应部分，所述目标材料流入所述供应部分; 喷嘴，其包括与要供给的目标材料的供给部连通的喷嘴孔; 以及覆盖喷嘴孔的壁面的涂布部。

公开(公告)号：US20140034684A1

公开(公告)日：2014-02-06

申请号：US14047895

申请日：2013-10-07

Applicant: CKD CORPORATION ,  GIGAPHOTON, INC.

Inventor： Takanobu ISHIHARA ,  Hiroshi ITAFUJI

IPC: H05G2/00

CPC classification number: H05G2/006 ,  G03F7/70033 ,  H05G2/003 ,  H05G2/008

Abstract: A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.

Abstract translation: 目标供给装置包括用于储存液体目标材料的罐，用于在罐中输出液体目标材料的喷嘴和用于将气体供应到罐中的气体供应源，并且以 从设置有压力调节器的气体供给源供给的气体。 目标供给装置还包括其一端连接到罐并且另一端形成排气口的减压气体通道，设置在减压气体通道上的减压阀，以及用于控制开路的控制器 /关闭减压阀。 当目标材料不从喷嘴输出时，控制器打开减压阀并降低罐内的压力。

公开(公告)号：US20130146682A1

公开(公告)日：2013-06-13

申请号：US13655320

申请日：2012-10-18

Applicant: GIGAPHOTON INC.

Inventor： Takanobu ISHIHARA ,  Osamu WAKABAYASHI ,  Toshiyuki HIRASHITA

IPC: B05B1/14

CPC classification number: G03F7/70033 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A target supply device may include a reservoir configured to store a target material, the reservoir having a first channel through which the target material passes, a nozzle plate having a second channel through which the target material passes after passing through the first channel, and a filter having a first surface and a second surface and provided between the reservoir and the nozzle plate such that the first surface and the reservoir are face-sealed and the second surface and the nozzle plate are face-sealed, the filter having a plurality of through-holes through which the target material passes.

Abstract translation: 目标供应装置可以包括被配置为存储目标材料的储存器，储存器具有目标材料通过的第一通道，具有目标材料在通过第一通道之后通过的第二通道的喷嘴板，以及 过滤器具有第一表面和第二表面，并且设置在储存器和喷嘴板之间，使得第一表面和储存器被面密封，并且第二表面和喷嘴板被面密封，过滤器具有多个通孔 目标材料通过的孔。