公开(公告)号：US20210370259A1

公开(公告)日：2021-12-02

申请号：US17398891

申请日：2021-08-10

Applicant: ENTEGRIS, INC.

Inventor： Lawrence H. Dubois ,  Donald J. Carruthers ,  Melissa A. Petruska ,  Edward A. Sturm ,  Shaun M. Wilson ,  Steven M. Lurcott ,  Bryan C. Hendrix ,  Joseph D. Sweeney ,  Michael J. Wodjenski ,  Oleg Byl ,  Ying Tang ,  Joseph R. Despres ,  Matthew Thomas Marlow ,  Christopher Scannell ,  Daniel Elzer ,  Kavita Murthi

IPC: B01J20/10 ,  B01J20/20 ,  B01J20/22 ,  B01J20/28 ,  F17C11/00 ,  H01L21/67 ,  B01J20/26 ,  B01J20/02

Abstract: Adsorbents of varying types and forms are described, as usefully employed in gas supply packages that include a gas storage and dispensing vessel holding such adsorbent for storage of sorbate gas thereon, and a gas dispensing assembly secured to the vessel for discharging the sorbate gas from the gas supply package under dispensing conditions thereof. Corresponding gas supply packages are likewise described, and various methods of processing the adsorbent, and manufacturing the gas supply packages.

公开(公告)号：US20200206717A1

公开(公告)日：2020-07-02

申请号：US15773652

申请日：2016-11-04

Applicant: ENTEGRIS, INC.

Inventor： Lawrence H. Dubois ,  Donald J. Carruthers ,  Melissa A. Petruska ,  Edward A. Sturm ,  Shaun M. Wilson ,  Steven M. Lurcott ,  Bryan C. Hendrix ,  Joseph D. Sweeney ,  Michael J. Wodjenski ,  Oleg Byl ,  Ying Tang ,  Joseph R. Despres ,  Matthew Thomas Marlow ,  Christopher Scannell ,  Daniel Elzer ,  Kavita Murthi

IPC: B01J20/10 ,  B01J20/28 ,  B01J20/22 ,  B01J20/20 ,  H01L21/67 ,  F17C11/00

Abstract: Adsorbents of varying types and forms are described, as usefully employed in gas supply packages that include a gas storage and dispensing vessel holding such adsorbent for storage of sorbate gas thereon, and a gas dispensing assembly secured to the vessel for discharging the sorbate gas from the gas supply package under dispensing conditions thereof. Corresponding gas supply packages are likewise described, and various methods of processing the adsorbent, and manufacturing the gas supply packages.

公开(公告)号：US20190078696A1

公开(公告)日：2019-03-14

申请号：US15743109

申请日：2016-07-08

Applicant: Entegris, Inc.

Inventor： Glenn M. Tom ,  Karl W. Olander ,  James A. Dietz ,  Michael J. Wodjenski ,  Edward A. Sturm ,  Susan K. Dimascio ,  Luping Wang ,  James V. McManus ,  Steven M. Lurcott ,  Jose I. Amo ,  Paul J. Marganski ,  Joseph D. Sweeney ,  Shaun M. Wilson ,  Steven E. Bishop ,  Greg Nelson ,  Donald J. Carruthers ,  Sharad N. Yedave ,  Ying Tang ,  Joseph Despres ,  Barry Chambers ,  Richard Ray ,  Daniel Elzer

IPC: F16K17/00 ,  F16K17/04 ,  F16K31/00 ,  F16K31/06 ,  F17C13/04

Abstract: Fluid supply packages of varying types are described, which are useful for delivery of fluids to fluid-utilizing facilities such as semiconductor manufacturing facilities, solar panel manufacturing facilities, and flat-panel display manufacturing facilities. The fluid supply packages include fluid supply vessels and valve heads of varied configuration, as useful to constitute fluid supply packages that are pressure-regulated and/or adsorbent-based in character.

公开(公告)号：US20170003056A1

公开(公告)日：2017-01-05

申请号：US15100304

申请日：2014-11-28

Applicant: ENTEGRIS, INC.

Inventor： Edward A. Sturm ,  J. Donald Carruthers ,  Shaun M. Wilson ,  Michael J. Wodjenski ,  Lawrence H. Dubois

IPC: F25B17/08 ,  B01J20/28 ,  B01J20/20

CPC classification number: F25B17/08 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/2804 ,  B01J20/28042 ,  B01J20/28052 ,  B01J20/2808 ,  B01J20/28083

Abstract: An adsorbent assembly for use in an adsorption heating and/or cooling system is described. The adsorbent assembly includes an array of adsorbent articles in which at least one adsorbent article is arranged in at least one of the following compatible arrangements (i)-(iii): (i) in contact with at least one other adsorbent article along matable engagement surfaces of respective contacting articles, with the contacting articles being configured to form a communicating gas flow passage through the contacting articles or at peripheral portions thereof; (ii) in a tube comprising at least one matable engagement surface that is in contact with a complementary matable engagement surface of another tube containing at least one adsorbent article; and (iii) in contact with a deformable foil member that is in contact with at least one other adsorbent article and/or a heat transfer member.

Abstract translation: 描述了用于吸附加热和/或冷却系统中的吸附剂组件。 吸附剂组件包括一组吸附制品，其中至少一种吸附制品布置在以下兼容布置（i） - （iii）中的至少一个中：（i）沿着可配合的接合与至少一种其它吸附制品接触 各个接触制品的表面，其中接触制品构造成形成通过接触制品或其周边部分的连通气体流动通道; （ii）在包括至少一个可配合接合表面的管中，所述接合表面与包含至少一种吸附制品的另一管的互补配对接合表面接触; 和（iii）与与至少一种其它吸附制品和/或传热构件接触的可变形箔构件接触。