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公开(公告)号：US09487389B2
公开(公告)日：2016-11-08
申请号：US14959737
申请日：2015-12-04
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
CPC classification number: H04R19/005 , B81B3/0021 , B81B3/0075 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H01L41/09 , H01L41/0926 , H01L2224/16225 , H01L2224/48091 , H01L2924/1461 , H01L2924/16151 , H01L2924/16152 , H04R1/222 , H04R23/006 , H04R2201/003 , Y10T29/49005 , H01L2924/00014
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalization of the air volumes above and below the membrane.
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公开(公告)号：US10730747B2
公开(公告)日：2020-08-04
申请号：US16179162
申请日：2018-11-02
Inventor： Colin Robert Jenkins
Abstract: The present application relates to MEMS transducer comprising a membrane electrode and a backplate electrode. The membrane electrode comprises primary and secondary openings.
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Patent Agency Ranking
公开(公告)号：US10560784B2
公开(公告)日：2020-02-11
申请号：US16443088
申请日：2019-06-17
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalisation of the air volumes above and below the membrane.
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公开(公告)号：US10375481B2
公开(公告)日：2019-08-06
申请号：US15665996
申请日：2017-08-01
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalisation of the air volumes above and below the membrane.
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公开(公告)号：US10343894B2
公开(公告)日：2019-07-09
申请号：US15676430
申请日：2017-08-14
Inventor： Stephen Duffy , Colin Robert Jenkins , Tsjerk Hans Hoekstra
Abstract: The application describes a MEMS transducer comprising a layer of conductive material provided on a surface of a layer of membrane material. The layer of conductive material comprises first and second regions, wherein the thickness and/or the conductivity of the/each first and second regions is different.
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公开(公告)号：US09994440B2
公开(公告)日：2018-06-12
申请号：US14902641
申请日：2014-06-30
Inventor： Colin Robert Jenkins , Tsjerk Hoekstra , Scott Cargill
CPC classification number: B81B3/0072 , B81B7/0061 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/04 , H04R7/10 , H04R19/005 , H04R19/04 , H04R2201/003
Abstract: The application describes improvements to (MEMS) transducers (100) having a flexible membrane (301) with a membrane electrode (302), especially where the membrane is crystalline or polycrystalline and the membrane electrode is metal or a metal alloy. Such transducers may typically include a back-plate having at least one back-plate layer (304) coupled to a back-plate electrode (303), with a plurality of holes (314) in the back-plate electrode corresponding to a plurality back-plate holes (312) through the back-plate. In embodiments of the invention the membrane electrode has at least one opening (313) in the membrane electrode wherein, at least part of the area of the opening corresponds to the area of at least one back-plate hole, in a direction normal to the membrane, and there is no hole in the flexible membrane at said opening in the membrane electrode. There may be a plurality of such openings. The openings effectively allow a reduction in the amount of membrane electrode material, e.g. metal, that may undergo plastic deformation and permanently deform the membrane. The openings are at least partly aligned with the back-plate holes to minimize any loss of capacitance.
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公开(公告)号：US20160083246A1
公开(公告)日：2016-03-24
申请号：US14959737
申请日：2015-12-04
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
IPC: B81B3/00
CPC classification number: H04R19/005 , B81B3/0021 , B81B3/0075 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H01L41/09 , H01L41/0926 , H01L2224/16225 , H01L2224/48091 , H01L2924/1461 , H01L2924/16151 , H01L2924/16152 , H04R1/222 , H04R23/006 , H04R2201/003 , Y10T29/49005 , H01L2924/00014
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalisation of the air volumes above and below the membrane.
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