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公开(公告)号：US10408596B2
公开(公告)日：2019-09-10
申请号：US15580213
申请日：2017-04-01
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor： Bin Bu , Changqi Hu , Shupeng Guo
Abstract: The present disclosure relates to an apparatus for detecting a distance between a carrier and a plate, the apparatus comprising: a base provided on the carrier; a rotation mechanism rotatably provided on the base and configured to rotate when the carrier is in contact with the plate during movement of the carrier relative to the plate; a rotation angle measuring mechanism configured to measure a rotation angle of the rotation mechanism so as to obtain the distance according to the rotation angle. The distance between the carrier and the plate can be calculated based on the rotation angle of the rotation mechanism, so that accurate measurement of the distance between the carrier and the plate can be realized. Further, the operation performance of the gap detection apparatus would not be affected or damaged by the vacuum environment.
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12.发明申请公开(公告)号：US20180080756A1
公开(公告)日：2018-03-22
申请号：US15520406
申请日：2016-08-02
Inventor： Fengjie Zhang , Shupeng Guo , Xiaoyun Liu
CPC classification number: G01B11/0683 , C23C14/542 , C23C14/545 , G01B21/08
Abstract: The present disclosure relates to a measurement tool, for measuring the thickness of an evaporated film at a particular position on a large-sized substrate. The measurement tool includes: a measurement part, having at least one measurement surface onto which at least one sampling substrate sheet is positional and fixable; and a support part connected with the support part and configured to be supportable on an edge frame of a mask so as to place the measurement part in an inside of the edge frame of the mask through the support part. The present disclosure also relates to a method of measuring a thickness of an evaporated film of a large-sized substrate by using the above measurement tool.
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