公开(公告)号：US20180148821A1

公开(公告)日：2018-05-31

申请号：US15503374

申请日：2016-06-06

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Wenyue Fu ,  Wei Cui

IPC: C23C14/04 ,  C23C14/24

CPC classification number: C23C14/042 ,  C23C14/04 ,  C23C14/24 ,  H01L51/0011

Abstract: The present disclosure provides a mask repairing apparatus, a method for repairing a mask and an evaporation apparatus. The mask repairing apparatus includes: a repairing device configured to repair a portion of a mask to be repaired; and a moving mechanism installed within a region facing towards the mask and configured to drive the repairing device to move to a position which is opposite to the portion of the mask to be repaired.