公开(公告)号：US09957192B2

公开(公告)日：2018-05-01

申请号：US15418611

申请日：2017-01-27

申请人： Applied Materials, Inc.

发明人： Chengtsin Lee ,  Jennifer Y. Sun

IPC分类号： C03C17/22 ,  C03C10/00 ,  C03C10/16 ,  C03C8/06 ,  C03C4/18 ,  C03C17/245

CPC分类号： C03C17/22 ,  C03C4/18 ,  C03C8/06 ,  C03C10/00 ,  C03C10/16 ,  C03C17/245 ,  C03C21/007 ,  C03C2204/00 ,  C03C2209/00 ,  C03C2217/214 ,  C03C2217/285 ,  C03C2218/13

摘要： An article comprises a body having a coating. The coating comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride. The coating includes a glaze on a surface of the coating, the glaze comprising the eutectic system having the super-lattice of the first fluoride and the second fluoride.

公开(公告)号：US20170283313A1

公开(公告)日：2017-10-05

申请号：US15418615

申请日：2017-01-27

申请人： Applied Materials, Inc.

发明人： Chengtsin Lee ,  Jennifer Y. Sun

IPC分类号： C03C17/22 ,  C03C17/245 ,  C03C8/06 ,  C03C4/18 ,  C03C10/00 ,  C03C10/16

CPC分类号： C03C17/22 ,  C03C4/18 ,  C03C8/06 ,  C03C10/00 ,  C03C10/16 ,  C03C17/245 ,  C03C21/007 ,  C03C2204/00 ,  C03C2209/00 ,  C03C2217/214 ,  C03C2217/285 ,  C03C2218/13

摘要： An article comprises a body having a coating. The coating comprising a mixture of a first oxide and a second oxide. The coating includes a glaze on a surface of the coating, the glaze comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride.

公开(公告)号：US20170282221A1

公开(公告)日：2017-10-05

申请号：US15089212

申请日：2016-04-01

申请人： Applied Materials, Inc.

发明人： Chengtsin Lee ,  Jennifer Y. Sun ,  Yikai Chen

IPC分类号： B08B3/12 ,  H01J37/32

CPC分类号： B08B3/12 ,  C11D11/0023 ,  H01J37/32009 ,  H01J37/32862

摘要： A method includes immersing an article comprising a yttrium based oxide in an acidic cleaning solution comprising water and 1-10 mol % HF acid. A portion of the yttrium based oxide is dissolved by the HF acid. A yttrium based oxy-fluoride is formed based on a reaction between the HF acid and the dissolved portion of the yttrium based. The yttrium based oxy-fluoride is precipitated onto the article over the yttrium based oxide to form a yttrium based oxy-fluoride coating. The acidic cleaning solution may include a yttrium based salt, which may additionally react with the HF acid to form more of the yttrium based oxy-fluoride.

公开(公告)号：US20170260616A1

公开(公告)日：2017-09-14

申请号：US15418598

申请日：2017-01-27

申请人： Applied Materials, Inc.

发明人： Chengtsin Lee ,  Jennifer Y. Sun

IPC分类号： C23C4/134 ,  C23C4/04

CPC分类号： C23C4/134 ,  C23C4/04

摘要： An article comprises a body and at least one final plasma resistant coating layer on at least one surface of the body. The at least one final plasma resistant coating layer is a mixture of a ScF3 and an initial plasma resistant coating material selected from the group consisting of YF3, Y2O3, a compound of Y4Al2O9, a solid-solution of Y2O3—ZrO2, CaF2, MgF2, SrF2, AlF3, ErF3, LaF3, NdF3, ScF3, CeF4, ZrF4, and combinations thereof. The at least one final plasma resistant coating layer has a thermal expansion coefficient that is within about 20% of the thermal expansion coefficient of the body.