公开(公告)号：US10802410B2

公开(公告)日：2020-10-13

申请号：US15299240

申请日：2016-10-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Nicolaas Rudolf Kemper ,  Marcel Beckers ,  Stefan Philip Christiaan Belfroid ,  Ferdy Migchelbrink ,  Sergei Shulepov

IPC: G03F7/20

Abstract: A plurality of extraction conduits is provided to remove immersion liquid into a chamber. The extraction conduits are arranged at different distances from a target portion of the substrate. From the chamber, a passage is provided to which a suction force is applied. When all the conduits are filled with immersion liquid, the extraction capacity will be greater than when one or more of the conduits comprise gas.