公开(公告)号：US09785051B2

公开(公告)日：2017-10-10

申请号：US14435450

申请日：2013-09-17

Applicant: ASML Netherlands B.V.

Inventor： Jan Bernard Plechelmus Van Schoot ,  Sven Antoin Johan Hol ,  Edwin Johan Buis ,  Erik Maria Rekkers ,  Gosse Charles De Vries ,  Hako Botma ,  Marinus Johannes Maria Van Dam ,  Ramon Pascal Van Gorkom

IPC: G03F7/20 ,  G02B7/182 ,  H02K41/00 ,  G01C9/06 ,  H01F7/02 ,  H01F7/20 ,  H01H51/22

CPC classification number: G03F7/70091 ,  G01C9/06 ,  G01C2009/066 ,  G02B7/1821 ,  G03F7/70116 ,  H01F7/0231 ,  H01F7/206 ,  H01H2051/2218 ,  H02K41/00

Abstract: An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.