公开(公告)号：US20230400423A1

公开(公告)日：2023-12-14

申请号：US18034886

申请日：2021-11-01

申请人： Rigaku Corporation

发明人： Makoto KAMBE ,  Kazuhiko OMOTE ,  Toshifumi HIGUCHI ,  Tsutomu TADA ,  Hajime FUJIMURA ,  Masahiro NONOGUCHI ,  Licai JIANG ,  Boris VERMAN ,  Yuriy PLATONOV

IPC分类号： G01N23/223

CPC分类号： G01N23/223

摘要： Provided is a total reflection X-ray fluorescence spectrometer which has high analysis sensitivity and analysis speed. The total reflection X-ray fluorescence spectrometer includes: an X-ray source that has an electron beam focal point having an effective width in a direction parallel to a surface of a sample, and orthogonal to an X-ray irradiation direction, that is larger than a dimension in the irradiation direction; a reflective optic that has an effective width in the orthogonal direction that is larger than that of the electron beam focal point, and has a curved surface in the irradiation direction; and a plurality of detectors that are arranged in a row in the orthogonal direction, and are configured to measure intensities of fluorescent X-rays emitted from the sample irradiated with primary X-rays focused by the reflective optic.

公开(公告)号：US20230384248A1

公开(公告)日：2023-11-30

申请号：US18228021

申请日：2023-07-31

申请人： RIGAKU CORPORATION

发明人： Naoki Matsushima ,  Kiyoshi Ogata ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Kazuhiko Omote ,  Hiroshi Motono ,  Shigematsu Asano ,  Katsutaka Horada ,  Sensui Yasuda

IPC分类号： G01N23/201 ,  G01N23/20016 ,  G01N23/20025

CPC分类号： G01N23/201 ,  G01N23/20016 ,  G01N23/20025 ,  G01N2223/054 ,  G01N2223/3306 ,  G01N2223/6116

摘要： A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm 11 being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.

公开(公告)号：US11821855B2

公开(公告)日：2023-11-21

申请号：US17295863

申请日：2019-11-21

申请人： Rigaku Corporation

发明人： Takashi Sato

IPC分类号： G01N1/28 ,  G01N23/20 ,  G01N23/20025 ,  G01N23/205 ,  G01N23/207

CPC分类号： G01N23/20025 ,  G01N1/28 ,  G01N23/205 ,  G01N23/207

摘要： A sample holder capable of quickly and precisely performing single-crystal X-ray structure analysis by quickly and easily soaking a sample in a crystalline sponge, and also a sample holder unit and a soaking method therefor are provided. There are provided a sample holder used in a single-crystal X-ray structure analysis apparatus is provided, the sample holder comprising a base part attached to a goniometer in the single-crystal X-ray structure analysis apparatus; a sample holding part formed in the base part to hold the porous complex crystal capable of soaking the sample in a plurality of fine pores formed therein; and a sample introduction structure formed in the base part and introducing the sample to be soaked in the porous complex.

公开(公告)号：US11808721B2

公开(公告)日：2023-11-07

申请号：US17588908

申请日：2022-01-31

申请人： Rigaku Corporation

发明人： Takeshi Osakabe

IPC分类号： G01N23/20016 ,  G01N23/20025

CPC分类号： G01N23/20016 ,  G01N23/20025

摘要： Provided is an X-ray analysis apparatus including: a goniometer; a sample stage provided at a rotation center of the goniometer; an X-ray source configured to irradiate a sample with an X-ray, the sample being fixed on the sample stage; an X-ray detector configured to detect the X-ray diffracted by the sample; and an opening/closing mechanism configured to vary a width of a slit, which is formed between a pair of shielding members, by opening/closing the pair of shielding members, the opening/closing mechanism including an asymmetric control unit configured to control aperture widths of the pair of shielding members asymmetrically for one of the pair of shielding members on one side and another one of the pair of shielding members on another side depending on a rotation angle of the goniometer.

公开(公告)号：US11796495B2

公开(公告)日：2023-10-24

申请号：US18022996

申请日：2021-06-09

申请人： Rigaku Corporation

发明人： Shinya Kikuta ,  Makoto Doi

IPC分类号： G01N23/223 ,  G06N3/0464

CPC分类号： G01N23/223 ,  G06N3/0464 ,  G01N2223/6116

摘要： Provided are a total reflection X-ray fluorescence spectrometer and an estimation method which are capable of easily and quickly estimating whether contamination exists on a substrate through use of a machine learning device. The total reflection X-ray fluorescence spectrometer includes: a spectrum acquisition unit configured to acquire a spectrum; and a learning unit which includes an estimation unit configured to generate estimation data on an element contained in contamination on a surface of a substrate in response to input of the spectrum, and for which learning by the estimation unit has been executed based on teacher data including the spectrum for learning and data on the element contained in the contamination on the surface of the substrate which has been used to acquire the spectrum for learning and the estimation data generated when the spectrum for learning is input to the estimation unit.

公开(公告)号：US11788974B2

公开(公告)日：2023-10-17

申请号：US17119166

申请日：2020-12-11

申请人： Rigaku Corporation

发明人： Shintaro Kobayashi ,  Katsuhiko Inaba ,  Hisashi Konaka

IPC分类号： G01N23/20016 ,  G01N23/207

CPC分类号： G01N23/20016 ,  G01N23/207 ,  G01N2223/056 ,  G01N2223/303 ,  G01N2223/61

摘要： There is provided a control apparatus 40 that controls a tilt of a sample, the control apparatus comprising an input section 41 that receives an input of inclination information representing inclination of the sample with respect to a ϕ axis; an adjustment amount determination section 43 that determines adjustment amounts of a ω value and a χ value for correcting a deviation amount between a scattering vector and a normal line to a sample surface or a lattice plane with respect to a ϕ value that varies, using the inclination information; and a drive instruction section 47 that drives a goniometer according to ϕ axis rotation of the sample, based on the determined adjustment amounts of the ω value and the χ value, during an X-ray diffraction measurement.

公开(公告)号：US20230060446A1

公开(公告)日：2023-03-02

申请号：US17793913

申请日：2020-12-04

申请人： Rigaku Corporation

发明人： Yoshiyuki KATAOKA ,  Yasushi KUSAKABE

IPC分类号： G01N23/223 ,  G01N23/2208

摘要： Provided are a quantitative analysis method, a quantitative analysis program, and an X-ray fluorescence spectrometer. The quantitative analysis method includes: a step of acquiring a representative composition set to represent contents of analysis components; a step of acquiring a plurality of comparative compositions, in each of which the content of one of the analysis components of the representative composition is changed by a predetermined content; a detection intensity calculation step of calculating a detection intensity indicating an intensity of fluorescent X-rays detected under the influence of the geometry effect through use of an FP method with respect to a virtual sample having a thickness set in advance and being indicated by each of the representative composition and the comparative compositions; and a step of calculating a matrix correction coefficient for each of the analysis components based on the detection intensity.

公开(公告)号：US20220128495A1

公开(公告)日：2022-04-28

申请号：US17295858

申请日：2019-11-21

申请人： Rigaku Corporation

发明人： Takashi SATO

IPC分类号： G01N23/207 ,  G01N23/20025

摘要： User-friendly single-crystal X-ray structure analysis apparatus and method for quickly performing a single-crystal X-ray structure analysis using a crystalline sponge and enabling the analysis including management of related information, and a sample holder and an applicator therefor are provided. There are provided a single-crystal X-ray structure analysis apparatus that performs a structure analysis of a material is provided, the apparatus comprising a sample holder that comprises a porous complex crystal capable of soaking the sample in a plurality of fine pores formed therein and that holds the sample; a goniometer that rotationally moves with the sample holder 250 being attached; and an information acquisition section 600 that acquires information about the porous complex crystal.

公开(公告)号：US20220011247A1

公开(公告)日：2022-01-13

申请号：US17295863

申请日：2019-11-21

申请人： Rigaku Corporation

发明人： Takashi SATO

IPC分类号： G01N23/20025 ,  G01N1/28 ,  G01N23/205 ,  G01N23/207

摘要： A sample holder capable of quickly and precisely performing single-crystal X-ray structure analysis by quickly and easily soaking a sample in a crystalline sponge, and also a sample holder unit and a soaking method therefor are provided. There are provided a sample holder used in a single-crystal X-ray structure analysis apparatus is provided, the sample holder comprising a base part attached to a goniometer in the single-crystal X-ray structure analysis apparatus; a sample holding part formed in the base part to hold the porous complex crystal capable of soaking the sample in a plurality of fine pores formed therein; and a sample introduction structure formed in the base part and introducing the sample to be soaked in the porous complex.

公开(公告)号：US11131637B2

公开(公告)日：2021-09-28

申请号：US16854428

申请日：2020-04-21

申请人： Rigaku Corporation

发明人： Yoshiyasu Ito ,  Kazuhiko Omote

IPC分类号： G01N23/201 ,  G01N23/20008 ,  G01B15/04

摘要： Provided is an analysis method for a fine structure, that is capable of determining shapes of scattering bodies that are long in a thickness direction of a plate-shaped sample; and provided are an apparatus and a program thereof. There is provided an analysis method for a fine structure of a plate-shaped sample formed to have scattering bodies that are long in a thickness direction and periodically arranged, comprising the steps of preparing data of a scattering intensity from the plate-shaped sample measured via transmission of X-rays at a plurality of ω rotation angles; calculating a scattering intensity of the X-rays scattered by the plate-shaped sample under a specific condition; fitting the calculated scattering intensity to the prepared scattering intensity; and determining shapes of the scattering bodies for the plate-shaped sample, based on a result of the fitting.