公开(公告)号：US07096711B2

公开(公告)日：2006-08-29

申请号：US10844200

申请日：2004-05-12

申请人： Ami Chand ,  Nihat Okulan

发明人： Ami Chand ,  Nihat Okulan

IPC分类号： G01B21/30

CPC分类号： G01Q40/02

摘要： A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of the opposed edges overhangs an undercut region of the micromachined crystalline structure by an overhang distance that is greater than one third of the width. The probe tip is scanned across the edges of the characterizer for shape determination. The characterizer is formed by serially deep reactive ion etching and anisotropic etching (100) single crystal silicon. The opposed edges may be oxidation sharpened for use in profiling a bottom surface of the probe tip.

摘要翻译： 用于确定原子力显微镜的探针尖端的形状的表征器以及制造和使用该表征器的方法。 表征器包括微加工的晶体结构，其具有由适合于表征探针尖端的尺寸的宽度分开的相对边缘。 相对的边缘中的至少一个通过超过宽度的三分之一的伸出距离伸出微加工结晶结构的底切区域。 探针尖端扫描在表征器的边缘以进行形状确定。 表征器通过串联深反应离子蚀刻和各向异性蚀刻（100）单晶硅形成。 相对的边缘可以被氧化锐化以用于对探针末端的底表面进行成形。