Gas detection device and gas detection method

    公开(公告)号:US11567021B2

    公开(公告)日:2023-01-31

    申请号:US16973063

    申请日:2019-04-24

    Abstract: A gas detector uses a MEMS gas sensor having: a substrate provided with a cavity and an insulating film over the cavity; a metal oxide semiconductor and a heater both provided on the insulating film. A drive circuit operates the heater with a predetermined period for a predetermined pulse duration in order to heat the metal oxide semiconductor. The drive circuit halts operation of the heater or elongates the period when a humidity sensor detects that the atmosphere is humid.

    GAS DETECTION DEVICE AND GAS DETECTION METHOD USING METAL-OXIDE SEMICONDUCTOR GAS SENSOR

    公开(公告)号:US20210247341A1

    公开(公告)日:2021-08-12

    申请号:US17054893

    申请日:2019-03-01

    Inventor: Kuniyuki IZAWA

    Abstract: A gas detector comprises a metal oxide semiconductor gas sensor whose resistance decreases in reducing gases and a digital information processing device that treats the output of the gas sensor and compares the output with a comparison value for gas detection. The digital information processing device extracts data representing the resistance of the gas sensor in air from the output of the gas sensor and generates the comparison value such that the larger the resistance of the gas sensor in air is, the larger the ratio between the resistance of the gas sensor in air and a resistance value corresponding to the comparison value is.

    Gas sensor
    17.
    发明申请
    Gas sensor 失效
    气体传感器

    公开(公告)号:US20010003916A1

    公开(公告)日:2001-06-21

    申请号:US09734546

    申请日:2000-12-13

    CPC classification number: G01N33/004 G01N27/12 G01N33/0047

    Abstract: A central electrode 12 is arranged in a coiled heater electrode 10. They are buried in a SnO2-based inner area 6, and the entirety is covered by a filter 8. The volume of the inner area 6 is set at from 1null10null3 mm3 to 16null10null3 mm3, the total volume of the bead 4 is set at from 15null10null3 mm3 to 70null10null3 mm3, and the ratio of the total volume of the bead 4 to the volume of the inner area 6 is set at from 4 to 20 to bring the sensor resistance in CO and that in methane closer to each other and increase the selectivity from hydrogen.

    Abstract translation: 中心电极12布置在线圈加热器电极10中。它们被埋在基于SnO 2的内部区域6中,并且整个被过滤器8覆盖。内部区域6的体积设定为1×10 -3 mm 3 到16×10 -3 mm 3,珠4的总体积设定为15×10 -3 mm 3〜70×10 -3 mm 3,珠4的总体积与内区6的体积的比率设定为 4至20以使传感器电阻在CO和甲烷中的电阻更接近并增加氢的选择性。

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