Invention Grant
- Patent Title: Gas detection device and gas detection method
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Application No.: US16973063Application Date: 2019-04-24
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Publication No.: US11567021B2Publication Date: 2023-01-31
- Inventor: Masakazu Sai , Kuniyuki Izawa , Tomohiro Kawaguchi
- Applicant: Figaro Engineering Inc.
- Applicant Address: JP Minoo
- Assignee: Figaro Engineering Inc.
- Current Assignee: Figaro Engineering Inc.
- Current Assignee Address: JP Minoo
- Agency: Keating and Bennett, LLP
- Priority: JPJP2018-118063 20180621
- International Application: PCT/JP2019/017382 WO 20190424
- International Announcement: WO2019/244475 WO 20191226
- Main IPC: G01N27/12
- IPC: G01N27/12

Abstract:
A gas detector uses a MEMS gas sensor having: a substrate provided with a cavity and an insulating film over the cavity; a metal oxide semiconductor and a heater both provided on the insulating film. A drive circuit operates the heater with a predetermined period for a predetermined pulse duration in order to heat the metal oxide semiconductor. The drive circuit halts operation of the heater or elongates the period when a humidity sensor detects that the atmosphere is humid.
Public/Granted literature
- US20210270760A1 GAS DETECTION DEVICE AND GAS DETECTION METHOD Public/Granted day:2021-09-02
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