公开(公告)号：US20040046405A1

公开(公告)日：2004-03-11

申请号：US10654012

申请日：2003-09-04

Applicant: SMC Corporation

Inventor： Yoshihiro Fukano ,  Shoichi Makado

IPC: B25J015/06

CPC classification number: B65G47/917 ,  B65G47/911 ,  H01L21/6838 ,  H05K13/0409

Abstract: In a suction device, a suction head is alternately connected to a negative pressure source and a positive pressure source by means of a switching valve, a light-weight workpiece is sucked by and released from the suction head. When the suction head and the positive pressure source are connected to each other by means of the switching valve to release the workpiece, a releasing pressure is instantaneously supplied to the suction head. The magnitude of the releasing pressure is set to a value equal to or less than the atmospheric pressure and set to a value which is necessary for the workpiece to drop by its own weight from the suction head.

Abstract translation: 在抽吸装置中，抽吸头通过切换阀交替地连接到负压源和正压源，重量轻的工件被吸入头并从吸头释放。 当吸头和正压源通过切换阀彼此连接以释放工件时，将释放压力瞬间提供给吸头。 释放压力的大小被设定为等于或小于大气压力的值，并设定为工件通过其自身重量从吸头降低所需的值。

公开(公告)号：US5948341A

公开(公告)日：1999-09-07

申请号：US982437

申请日：1997-12-02

Applicant: Andrea Lucille Diamond ,  Paul Fedor Kresak

Inventor： Andrea Lucille Diamond ,  Paul Fedor Kresak

IPC: B29C33/46 ,  B29C45/42 ,  B29C45/43 ,  B65G47/91 ,  B29C37/00 ,  B29C39/36

CPC classification number: B65G47/911 ,  B29C45/4225 ,  B29C2045/4233

Abstract: Lightweight part retention apparatus is arranged on a removal tool plate. A low pressure air supply is supplied to the apparatus to induce an area of reduced pressure in a channel formed in a passage therein, the reduced pressure being formed by a jet pump action within the channel. The reduced pressure draws a part to be removed from a mold or the like into the apparatus and retains it therein until a separate device removes it and/or the air supply is interrupted. Due to the relatively low mass of the retention apparatus, the tool plate and retention apparatus, with the molded part retained therein, can then be rapidly withdrawn from the open mold to permit early closing of the mold so that a new molding cycle may begin.

Abstract translation: 轻型部件保持装置布置在拆卸工具板上。 向设备供应低压空气源，以在通道中形成的通道中引入减压区域，减压通过通道内的喷射泵作用形成。 减压将一部分从模具等中取出进入设备中并将其保持在其中，直到单独的装置将其去除和/或空气供应中断。 由于保持装置的质量相对较低，随后将模制部件保持在其中的工具板和保持装置可以从打开的模具中快速抽出，以允许模具的早期关闭，从而可以开始新的模制循环。

公开(公告)号：US4921520A

公开(公告)日：1990-05-01

申请号：US149400

申请日：1988-01-28

Applicant: Giovanni M. Carlomagno

Inventor： Giovanni M. Carlomagno

IPC: C03B35/24 ,  B65G47/91 ,  C03B23/035 ,  C03B27/044 ,  C03B35/14

CPC classification number: C03B23/0357 ,  B65G47/911 ,  C03B23/035 ,  C03B27/0404 ,  C03B35/147 ,  B65G2249/045 ,  C03B2225/02

Abstract: The present invention relates to a process and a device for applying tensile forces, with no contact with solid walls, to glass sheets, in particular at high temperatures, wherein a gas or vapor is blown between the glass sheet and a wall closely approached, and parallel, to said glass sheet. Between the glass sheet and said wall a gas cushion is established, in that the sections through which the gas flows inside the air gap between the glass sheet and the wall increase on the average in the direction of streaming of the gas, so as to allow the gas speed to decrease, and a recovery in gas pressure to consequently take place. Several forms of practical embodiment of the device are disclosed.

公开(公告)号：US4858975A

公开(公告)日：1989-08-22

申请号：US258512

申请日：1988-10-17

Applicant: Tsutomu Ogawa

Inventor： Tsutomu Ogawa

IPC: B65H1/28 ,  B25J15/06 ,  B65G1/00 ,  B65G1/07 ,  B65G47/91 ,  B65G49/07 ,  B65H3/08 ,  H01L21/677 ,  H01L21/683

CPC classification number: B65G47/911 ,  H01L21/6838 ,  Y10T279/11

Abstract: A vacuum chuck apparatus operable in both gas and liquid includes a liquid-gas separating membrane which allows passage of gas molecules but prevents passage of liquid. The liquid-gas separating membrane is disposed between an inlet hole of the chuck and a manifold which is connected to a pneumatic system. The pneumatic system includes an aspirator, a compressor and a switching valve. The vacuum chuck is immersed into a liquid, compressed gas purges the liquid in the inlet hole, then the switching valve is switched to the aspirator. An object, such as a semiconductor wafer, is vacuumed quickly to the chuck, and the inlet hole is closed by the object. If a small quantity of liquid intrudes into the chuck, it is stopped by the liquid-gas separating membrane.

公开(公告)号：US4445494A

公开(公告)日：1984-05-01

申请号：US304941

申请日：1981-09-23

Applicant: Bernd Schiele ,  Johann Niedermeier

Inventor： Bernd Schiele ,  Johann Niedermeier

IPC: B23Q3/08 ,  B23B23/02 ,  B28D5/00 ,  B28D5/02 ,  B65G47/91 ,  H01L21/683 ,  B28D7/04

CPC classification number: B65G47/911 ,  B23B23/02 ,  B28D5/0094 ,  H01L21/6838 ,  B23B2233/08 ,  B23B2270/28 ,  Y10T83/2066

Abstract: A process and apparatus for supporting crystalline wafers utilizing the sion effect of flowing gas on the crystalline wafers. An almost point-like support of the crystalline wafer is achieved. Furthermore, the invention relates to a holding tool for carrying out the process, which tool has at the center of the holding face, a point-like projection.

Abstract translation: 利用在晶体晶片上流动气体的吸力效应来支撑晶体晶片的方法和装置。 实现晶体晶片几乎点状的支撑。 此外，本发明涉及一种用于执行工具的保持工具，该工具在保持面的中心处具有点状突起。

公开(公告)号：US4252512A

公开(公告)日：1981-02-24

申请号：US963653

申请日：1978-11-24

Applicant: Thomas A. Kornylak

Inventor： Thomas A. Kornylak

IPC: B29C44/30 ,  B65G47/91 ,  B65G51/03 ,  B29C1/04 ,  B29D27/04

CPC classification number: B65G51/03 ,  B29C44/30 ,  B65G47/911 ,  B29L2007/00 ,  Y10S425/002 ,  Y10T137/206

Abstract: A conveying and supporting surface is provided with a plurality of coanda effect nozzles for providing a directional film of gas along the surface to support and/or convey a plurality of articles, in indefinite length web, or material along the surface. The directional coanda effect nozzles will produce a conveying film of gas and a film of gas that will produce a suction spaced from the surface to hold the articles closely adjacent the surface while at the same time produce an air bearing to prevent the articles or web material from contacting the surface.

Abstract translation: 输送和支撑表面设置有多个联结效应喷嘴，用于沿表面提供气体的定向膜，以支撑和/或输送沿着表面的不定长纤维网或材料的多个制品。 定向伸缩效应喷嘴将产生气体的输送膜和气体膜，其将产生与表面间隔开的吸力，以将制品紧紧保持在表面附近，同时产生空气轴承以防止物品或纤维网材料 从表面接触。

公开(公告)号：US4009785A

公开(公告)日：1977-03-01

申请号：US511324

申请日：1974-10-02

Applicant: Terence John Trayes

Inventor： Terence John Trayes

IPC: B65G47/91 ,  H01L21/67 ,  B65G53/50

CPC classification number: B65G47/911 ,  H01L21/67 ,  Y10S414/141

Abstract: A system for handling plate like objects (e.g., semiconductor wafers) includes a gas actuated fixture having a surface for releasably picking up the plate like objects (e.g., by Bernoulli effect). Means is provided for moving the pickup fixture in a plane of motion from a first to second position. Means forming a part of the pickup fixture (e.g., a selectively pressured bellows) moves the pickup surface orthogonally to the plane of motion. An air track or other conveyer for the plate like objects includes means for restraining the objects beneath the first position. Means for positioning successive locations of a carrier for the plate like objects positions the successive locations beneath the second position. In operation, the system picks up the plate like objects from the conveyer, loads them onto the carrier, then unloads them from the carrier and returns them to the conveyer, all without subjecting the objects to human contamination.

Abstract translation: 用于处理板状物体（例如，半导体晶片）的系统包括具有用于可释放地拾取板状物体（例如，通过伯努利效应）的表面的气体致动夹具。 提供了用于将拾取器具从运动平面移动到第一位置到第二位置的装置。 形成拾取器具（例如，选择性压力波纹管）的一部分的装置将拾取表面正交地移动到运动平面。 用于板状物体的空气轨道或其它输送机包括用于限制在第一位置下方的物体的装置。 用于定位用于板状物体的载体的连续位置的装置将连续位置定位在第二位置下方。 在操作中，系统从传送器拾取板状物体，将其装载到载体上，然后将其从载体上卸载并将其返回到输送机，而不会对物体造成人体的污染。

公开(公告)号：US3539216A

公开(公告)日：1970-11-10

申请号：US3539216D

申请日：1968-01-11

Applicant: SPRAGUE ELECTRIC CO

Inventor： FORCIER EDWARD C

IPC: B65G47/91 ,  B66C1/02

CPC classification number: B66C1/0293 ,  B65G47/911 ,  B66C1/0218 ,  B66C1/0287

公开(公告)号：US3523706A

公开(公告)日：1970-08-11

申请号：US3523706D

申请日：1967-10-27

Applicant: IBM

Inventor： LOGUE JOSEPH C

IPC: B65G47/91 ,  B66C1/02 ,  H01L21/683

CPC classification number: H01L21/6838 ,  B65G47/911 ,  B66C1/0212 ,  B66C1/0231 ,  B66C1/0268 ,  B66C1/0293