Abstract:
A locally-outcoupled optical resonator has whispering gallery modes existing in a nearly circular resonator. Light is outcoupled by providing a local perturbing feature on the perimeter of the locally-outcoupled cavity resonator. The perturbing feature provides an outcoupling or loss mechanism that asymmetrically interacts with circulating whispering gallery modes, thereby making the resonator capable of uni-directional output.
Abstract:
Several methods and structures for improving the yield of out-of-plane micro-device structures including springs and coils are described. In one method the elastic members have graded perforations for controlling rate of release. In another method and structure, a layout enables the contact landing area to be increased. The high yield structures may be used in numerous electronic applications such as filter circuits.