MEMS PROCESS AND DEVICE
    1.
    发明申请
    MEMS PROCESS AND DEVICE 有权
    MEMS工艺和器件

    公开(公告)号:US20140191344A1

    公开(公告)日:2014-07-10

    申请号:US14203131

    申请日:2014-03-10

    Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane . The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

    Abstract translation: 制造微机电系统(MEMS)换能器的方法包括以下步骤:在衬底上形成膜,并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤:形成第一后部体积部分和第二背部体积部分,第一后部体积部分与第二背部体积部分分离, 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积,从而能够增加后部体积,而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

    MEMS PROCESS AND DEVICE
    2.
    发明申请
    MEMS PROCESS AND DEVICE 有权
    MEMS工艺和器件

    公开(公告)号:US20140341402A1

    公开(公告)日:2014-11-20

    申请号:US14452067

    申请日:2014-08-05

    Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

    Abstract translation: 制造微机电系统(MEMS)换能器的方法包括以下步骤:在衬底上形成膜,并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤:形成第一后部体积部分和第二背部体积部分,第一后部体积部分与第二背部体积部分分离, 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积,从而能够增加后部体积,而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

    MEMS process and device
    3.
    发明授权
    MEMS process and device 有权
    MEMS工艺和器件

    公开(公告)号:US09363610B2

    公开(公告)日:2016-06-07

    申请号:US14452067

    申请日:2014-08-05

    Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

    Abstract translation: 制造微机电系统(MEMS)换能器的方法包括以下步骤:在衬底上形成膜,并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤:形成第一后部体积部分和第二背部体积部分,第一后部体积部分与第二背部体积部分分离, 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积,从而能够增加后部体积,而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

    MEMS PROCESS AND DEVICE
    4.
    发明申请
    MEMS PROCESS AND DEVICE 有权
    MEMS工艺和器件

    公开(公告)号:US20130256816A1

    公开(公告)日:2013-10-03

    申请号:US13902344

    申请日:2013-05-24

    Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

    Abstract translation: 制造微机电系统(MEMS)换能器的方法包括以下步骤:在衬底上形成膜,并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤:形成第一后部体积部分和第二背部体积部分,第一后部体积部分与第二背部体积部分分离, 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积,从而能够增加后部体积,而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

    MEMS process and device
    5.
    发明授权
    MEMS process and device 有权
    MEMS工艺和器件

    公开(公告)号:US08698256B2

    公开(公告)日:2014-04-15

    申请号:US13902344

    申请日:2013-05-24

    Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

    Abstract translation: 制造微机电系统(MEMS)换能器的方法包括以下步骤:在衬底上形成膜,并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤:形成第一后部体积部分和第二后部体积部分,第一后部体积部分与第二背部体积部分分离, 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积,从而能够增加后部体积,而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

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