公开(公告)号：US20240069262A1

公开(公告)日：2024-02-29

申请号：US17821606

申请日：2022-08-23

Applicant: VIAVI Solutions Inc.

Inventor： Jinhui YANG ,  Marius GRIGONIS ,  Andrew CLARK

IPC: G02B5/28 ,  G02B5/20

CPC classification number: G02B5/286 ,  G02B5/207 ,  G02B5/288

Abstract: An optical interference filter includes one or more sets of layers. Each set of layers includes a first layer that includes at least aluminum and nitrogen (e.g., an aluminum nitride (AlN) material), a second layer that includes at least silicon and oxygen (e.g., a silicon dioxide (SiO2) material), and a third layer that includes at least hydrogen and silicon (e.g., a hydrogenated silicon (Si:H) material). The second layer is disposed between the first layer and the third layer.

公开(公告)号：US20230168418A1

公开(公告)日：2023-06-01

申请号：US17457123

申请日：2021-12-01

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. OCKENFUSS ,  Jinhui YANG ,  Marius GRIGONIS ,  Karen Denise HENDRIX ,  Andy SHKABKO

IPC: G02B5/28 ,  G02B1/10

CPC classification number: G02B5/286 ,  G02B1/10

Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers comprises an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers comprises at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.

公开(公告)号：US20230095480A1

公开(公告)日：2023-03-30

申请号：US17449150

申请日：2021-09-28

Applicant: VIAVI Solutions Inc.

Inventor： Jinhui YANG ,  Marius GRIGONIS ,  Georg J. OCKENFUSS ,  Karen Denise HENDRIX

IPC: G02B5/28 ,  C23C14/00 ,  C23C14/06 ,  C23C14/35

Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate. The set of layers includes a first subset of layers, wherein the first subset of layers comprises an aluminum nitride (AlN) material, and wherein a stress of the first subset of layers is between −1000 and 800 megapascals; and a second subset of layers, wherein the second subset of layers comprises at least one other material.

公开(公告)号：US20230097506A1

公开(公告)日：2023-03-30

申请号：US17449149

申请日：2021-09-28

Applicant: VIAVI Solutions Inc.

Inventor： Jinhui YANG ,  Marius GRIGONIS ,  Georg J. OCKENFUSS ,  Karen Denise HENDRIX

IPC: G02B5/28 ,  C23C14/06 ,  C23C14/35

Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate. The set of layers includes a first subset of layers, wherein the first subset of layers comprises an aluminum nitride (AlN) material; and a second subset of layers, wherein the second subset of layers comprises a hydrogenated silicon (Si:H) material.

公开(公告)号：US20240411072A1

公开(公告)日：2024-12-12

申请号：US18808234

申请日：2024-08-19

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. OCKENFUSS ,  Jinhui YANG ,  Marius GRIGONIS ,  Karen Denise HENDRIX ,  Andy SHKABKO

IPC: G02B5/28 ,  G02B1/10

Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers includes an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers includes at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.

公开(公告)号：US20240085605A1

公开(公告)日：2024-03-14

申请号：US17931323

申请日：2022-09-12

Applicant: VIAVI Solutions Inc.

Inventor： Jinhui YANG ,  Marius GRIGONIS

IPC: G02B5/28

CPC classification number: G02B5/286 ,  G02B5/288

Abstract: In some implementations, an optical interference filter includes a substrate and one or more sets of layers that are disposed on the substrate. Each set of layers includes: a first layer that comprises at least tantalum and oxygen (e.g., a tantalum pentoxide (Ta2O5) material); a second layer that comprises at least aluminum and nitrogen (e.g., an aluminum nitride (AlN) material); and a third layer that comprises at least hydrogen and silicon (e.g., a hydrogenated silicon (Si:H) material). The second layer is disposed between the first layer and the third layer. In some implementations, a first surface of the second layer is disposed on a surface of the first layer, and a second surface of the second layer is disposed on a surface of the third layer.