Selectably configurable multiple mode spectroscopic ellipsometry
    1.
    发明授权
    Selectably configurable multiple mode spectroscopic ellipsometry 有权
    可选择配置的多模光谱椭偏仪

    公开(公告)号:US09404872B1

    公开(公告)日:2016-08-02

    申请号:US13538552

    申请日:2012-06-29

    Abstract: The present invention may include an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light reflected from the surface of the sample, a selectably configurable optical system comprising: a rotatable polarizing element disposed in the illumination arm of the optical system, an analyzing element disposed in the collection arm of the optical system, and a rotatable-translatable compensator element disposed in the collection arm of the optical system, and a control system communicatively configured to selectably configure the optical system in the a rotating compensator (RCSE) mode, a rotating polarizer (RPSE) mode, or a rotating polarizer and compensator (RPRC) mode.

    Abstract translation: 本发明可以包括被配置为照亮样品的表面的照明源,被配置为检测从样品的表面反射的光的至少一部分的检测器,可选择地配置的光学系统,包括:可旋转偏振元件,其设置在 光学系统的照明臂,设置在光学系统的收集臂中的分析元件和设置在光学系统的收集臂中的可旋转平移补偿元件,以及通信地配置为可选择地将光学系统配置在 旋转补偿器(RCSE)模式,旋转偏振器(RPSE)模式或旋转偏振器和补偿器(RPRC)模式。

    Measurement of Critical Dimension
    2.
    发明申请
    Measurement of Critical Dimension 有权
    关键尺寸的测量

    公开(公告)号:US20130003068A1

    公开(公告)日:2013-01-03

    申请号:US13174815

    申请日:2011-07-01

    Abstract: A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.

    Abstract translation: 一种用于在衬底上进行多波长,多方位角,多角度入射读数的光谱仪器,该仪器具有用于产生照明光束的宽带光源,用于将多个方位角的照明引导到衬底上的物镜 角度和多个入射角,从而产生反射光束,具有照明孔的孔板和形成在其中的多个收集孔,用于选择性地通过具有期望的方位角和角度的离散组合的反射光束的部分 - 用于接收方位角和入射角的离散组合并产生读数的检测器,以及用于解释读数的处理器。

    Measurement of critical dimension
    3.
    发明授权
    Measurement of critical dimension 有权
    关键尺寸的测量

    公开(公告)号:US08456639B2

    公开(公告)日:2013-06-04

    申请号:US13174815

    申请日:2011-07-01

    Abstract: A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.

    Abstract translation: 一种用于在衬底上进行多波长,多方位角,多角度入射读数的光谱仪器,该仪器具有用于产生照明光束的宽带光源,用于将多个方位角的照明引导到衬底上的物镜 角度和多个入射角,从而产生反射光束,具有照明孔的孔板和形成在其中的多个收集孔,用于选择性地通过具有期望的方位角和角度的离散组合的反射光束的部分 - 用于接收方位角和入射角的离散组合并产生读数的检测器,以及用于解释读数的处理器。

    Reconfigurable spectroscopic ellipsometer
    4.
    发明授权
    Reconfigurable spectroscopic ellipsometer 有权
    可重构光谱椭偏仪

    公开(公告)号:US08446584B2

    公开(公告)日:2013-05-21

    申请号:US13106940

    申请日:2011-05-13

    CPC classification number: G01B11/0641 G01B2210/56 G01N21/211 G01N21/956

    Abstract: A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.

    Abstract translation: 具有在样品的入射光束侧的第一旋转元件和样品的反射光束侧的第二旋转元件和具有积分时间的检测器的Mueller椭偏仪具有用于选择性和分别地调节(1 )第一旋转元件的第一角频率和(2)第二旋转元件的第二角频率。

    Reconfigurable Spectroscopic Ellipsometer
    5.
    发明申请
    Reconfigurable Spectroscopic Ellipsometer 有权
    可重构光谱椭偏仪

    公开(公告)号:US20120287433A1

    公开(公告)日:2012-11-15

    申请号:US13106940

    申请日:2011-05-13

    CPC classification number: G01B11/0641 G01B2210/56 G01N21/211 G01N21/956

    Abstract: A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.

    Abstract translation: 具有在样品的入射光束侧的第一旋转元件和样品的反射光束侧的第二旋转元件和具有积分时间的检测器的Mueller椭偏仪具有用于选择性和分别地调节(1 )第一旋转元件的第一角频率和(2)第二旋转元件的第二角频率。

    Azimuth angle measurement
    6.
    发明授权
    Azimuth angle measurement 有权
    方位角测量

    公开(公告)号:US08040511B1

    公开(公告)日:2011-10-18

    申请号:US12357294

    申请日:2009-01-21

    CPC classification number: G01N21/211 G01B11/26

    Abstract: Methods and apparatus for measuring an optical azimuth angle φO of a substrate relative to a plane of detection in scatterometry tools are disclosed. A grating target on a stage of a scatterometry tool may be illuminated and positions of the resulting diffraction orders may be observed. The optical azimuth angle may be determined from the positions of the diffraction orders. Alternatively, polarization-dependent signals of radiation scattered from a line grating may be measured for equal and opposite polarization angles +A and −A. A combination signal may be computed from the polarization-dependent signals obtained at +A and −A and a property of the combination signal may be calculated for several mechanical Azimuth angles φM. A relationship between the optical azimuth angle φO and the mechanical azimuth angle φM may be determined from a behavior of the property as a function of mechanical azimuth angle φM.

    Abstract translation: 公开了用于测量基底相对于散射测量工具中的检测平面的光学方位角< O的方法和装置。 可以照射散射测量工具的台上的光栅目标,并且可以观察所得衍射级的位置。 光学方位角可以从衍射级的位置确定。 或者,可以测量从线光栅散射的辐射的偏振相关信号,以获得相等和相反的偏振角+ A和-A。 可以从在+ A和-A处获得的偏振相关信号计算组合信号,并且可以针对若干机械方位角& M来计算组合信号的特性。 可以根据作为机械方位角的函数的性质的行为来确定光学方位角< O和机械方位角& M之间的关系。

    Apparatus and method for modification of telecommunication video content
    7.
    发明授权
    Apparatus and method for modification of telecommunication video content 有权
    电视视频内容修改的装置和方法

    公开(公告)号:US08982179B2

    公开(公告)日:2015-03-17

    申请号:US13527774

    申请日:2012-06-20

    CPC classification number: H04N7/141 H04N7/157 H04N21/44008 H04N21/8146

    Abstract: A method that incorporates teachings of the subject disclosure may include, for example, utilizing a system including at least one processor for determining a video modification plan for a received video stream of a video call session according to the at least one party associated with the video call session, modifying, by the system, a plurality of background images of the received video stream according to the video modification plan to generate a plurality of modified background images, and generating, by the system, a modified video stream according to the plurality of modified background images. Other embodiments are disclosed.

    Abstract translation: 结合本公开的教导的方法可以包括例如利用包括至少一个处理器的系统,用于根据与视频相关联的至少一个方确定视频呼叫会话的接收视频流的视频修改计划 呼叫会话,由系统修改根据该视频修改方案的接收到的视频流的多个背景图像,以生成多个修改后的背景图像,并且由该系统根据多个修改图像生成修改的视频流 修改背景图片。 公开了其他实施例。

    Method and apparatus for locating load-balanced facilities
    8.
    发明授权
    Method and apparatus for locating load-balanced facilities 有权
    用于定位负载平衡设施的方法和装置

    公开(公告)号:US08949842B2

    公开(公告)日:2015-02-03

    申请号:US12347810

    申请日:2008-12-31

    CPC classification number: G06F9/5072 G06F9/5027 H04L41/145

    Abstract: A method and apparatus for providing a facility location plan for a network with a V-shaped facility cost are disclosed. For example, the method receives an event from a queue, wherein the event comprises an open event or a tight event. The method connects a plurality of adjacent clients to a facility, if the event comprises the open event, and adds a new client-facility edge to a graph comprising a plurality of client-facility edges, if the event comprises the tight event.

    Abstract translation: 公开了一种用于提供具有V形设备成本的网络的设施位置计划的方法和装置。 例如,该方法从队列接收事件,其中事件包括打开事件或紧急事件。 如果事件包括打开事件,则该方法将多个相邻客户端连接到设施,并且如果事件包括紧密事件,则将新的客户机设施边缘添加到包括多个客户机设施边缘的图形中。

    System and method of bilateral image filtering
    9.
    发明授权
    System and method of bilateral image filtering 有权
    双边图像滤波的系统和方法

    公开(公告)号:US08737735B2

    公开(公告)日:2014-05-27

    申请号:US13524140

    申请日:2012-06-15

    CPC classification number: G06T5/20 G06T5/002 G06T2207/20028 G06T2207/20192

    Abstract: A method includes generating a first principle bilateral filtered image component from a source image. The first principle bilateral filtered image component corresponds to a second pixel value of a set, the second pixel value greater than or equal to a first pixel value. The method includes selectively updating a result pixel of a result image based on the first principle bilateral filtered image component and deallocating the first principle bilateral filtered image component. After deallocating the first principle bilateral filtered image component, a second principle bilateral filtered image component is generated from the source image. The second principle bilateral filtered image component corresponds to a third pixel value. The third pixel value is greater than the second pixel value. The third pixel value is less than or equal to a fourth pixel value. The result pixel is selectively updated based on the second principle bilateral filtered image component.

    Abstract translation: 一种方法包括从源图像生成第一原理双边滤波图像分量。 第一原理双边滤波图像分量对应于一组的第二像素值,第二像素值大于或等于第一像素值。 该方法包括基于第一原理双边滤波图像分量选择性地更新结果图像的结果像素并且取消分配第一原理双边滤波图像分量。 在解除分配第一原理双边滤波图像分量之后,从源图像生成第二原理双边滤波图像分量。 第二原理双边滤波图像分量对应于第三像素值。 第三像素值大于第二像素值。 第三像素值小于或等于第四像素值。 基于第二原理双边滤波图像分量选择性地更新结果像素。

    SYSTEM AND METHOD OF BILATERAL IMAGE FILTERING
    10.
    发明申请
    SYSTEM AND METHOD OF BILATERAL IMAGE FILTERING 有权
    双向图像滤波系统与方法

    公开(公告)号:US20130336585A1

    公开(公告)日:2013-12-19

    申请号:US13524140

    申请日:2012-06-15

    CPC classification number: G06T5/20 G06T5/002 G06T2207/20028 G06T2207/20192

    Abstract: A method includes generating a first principle bilateral filtered image component from a source image. The first principle bilateral filtered image component corresponds to a second pixel value of a set, the second pixel value greater than or equal to a first pixel value. The method includes selectively updating a result pixel of a result image based on the first principle bilateral filtered image component and deallocating the first principle bilateral filtered image component. After deallocating the first principle bilateral filtered image component, a second principle bilateral filtered image component is generated from the source image. The second principle bilateral filtered image component corresponds to a third pixel value. The third pixel value is greater than the second pixel value. The third pixel value is less than or equal to a fourth pixel value. The result pixel is selectively updated based on the second principle bilateral filtered image component.

    Abstract translation: 一种方法包括从源图像生成第一原理双边滤波图像分量。 第一原理双边滤波图像分量对应于一组的第二像素值,第二像素值大于或等于第一像素值。 该方法包括基于第一原理双边滤波图像分量选择性地更新结果图像的结果像素并且取消分配第一原理双边滤波图像分量。 在解除分配第一原理双边滤波图像分量之后,从源图像生成第二原理双边滤波图像分量。 第二原理双边滤波图像分量对应于第三像素值。 第三像素值大于第二像素值。 第三像素值小于或等于第四像素值。 基于第二原理双边滤波图像分量选择性地更新结果像素。

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