公开(公告)号：US12290778B2

公开(公告)日：2025-05-06

申请号：US17536048

申请日：2021-11-28

Applicant: Samsung Electronics Co., Ltd. ,  CSK Inc.

Inventor： Seo Young Maeng ,  Il Jun Jeon ,  Su Ji Gim ,  Jin Hong Kim ,  Young Seok Roh ,  Jong Yong Bae ,  Jung Joon Pyeon

IPC: B01D46/76 ,  B01D46/00 ,  B01D46/24 ,  B01D46/64 ,  B01D53/04 ,  C23C16/34 ,  C23C16/44 ,  C23C16/455 ,  H01L21/02

Abstract: A method of fabricating a semiconductor device includes providing a wafer inside a process chamber, performing an ALD (atomic layer deposition) process inside the process chamber to deposit titanium nitride on the wafer, providing a process gas used for the ALD process to a scrubber, filtering a first powder contained in the process gas, using a filter unit disposed in the scrubber and including a plurality of filters, adsorbing a second powder remaining in the process gas after passing through the filter unit, using a fin structure extending in a vertical direction inside the filter unit, and exhausting the process gas, from which the first and second powders are removed, from the scrubber.

公开(公告)号：US09152075B2

公开(公告)日：2015-10-06

申请号：US13714902

申请日：2012-12-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seung Bok Jung ,  Young Chae Kim ,  Jin Hong Kim

IPC: G03G15/00 ,  G03G21/18 ,  G03G15/06 ,  G03G21/16

CPC classification number: G03G15/06 ,  G03G21/1633 ,  G03G21/1842 ,  G03G21/1853 ,  G03G2221/1684 ,  G03G2221/1687 ,  G03G2221/1869

Abstract: An image forming apparatus is provided. The apparatus includes a body provided with an opening at one side thereof, a developing tray movably installed at the opening, a plurality of developing units mounted to the developing tray, and a pair of frames forming opposite inner sides of the body. The frames are provided with a plurality of seating grooves to support lower ends of the developing units such that the developing units are supported by the frames, and therefore the positions of the photosensitive bodies of the developing units with respect to other constituents supported by the frames may be accurately regulated.

Abstract translation: 提供一种图像形成装置。 该装置包括在其一侧设置有开口的主体，可移动地安装在开口处的显影盘，安装到显影盘的多个显影单元和形成相对的主体内侧的一对框架。 框架设置有多个座槽，以支撑显影单元的下端，使得显影单元由框架支撑，因此显影单元的感光体相对于由框架支撑的其它构件的位置 可能被准确地调节。