公开(公告)号：US20250081320A1

公开(公告)日：2025-03-06

申请号：US18638916

申请日：2024-04-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Injae LEE ,  Ohkug KWON ,  Youngduk SUH ,  Sunghyup KIM ,  Jeonggil KIM ,  Yebin NAM ,  Daegeun YOON ,  Seungpyo HONG

IPC: H05G2/00 ,  G03F7/00

Abstract: An extreme ultraviolet (EUV) light generating device includes a vessel having an internal space, a droplet generator generating droplets to be supplied to the internal space, a droplet emitter emitting the droplets generated by the droplet generator to the internal space, a laser light source generating a laser beam to generate EUV light by reaction with the droplets, a condensing mirror adjacent to the laser light source to at least partially surround the laser light source and concentrating EUV light on an intermediate focus (IF), and gas lock nozzles around the IF to respectively constitute rows and ejecting a flow control gas to the internal space, wherein a tilted direction of a gas lock nozzle in at least one of the rows is tilted in a direction consistent with a tilted direction of a sidewall of the vessel with respect to a central axis direction of the internal space.

公开(公告)号：US20240121877A1

公开(公告)日：2024-04-11

申请号：US18338789

申请日：2023-06-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Injae LEE ,  Sunghyup KIM ,  Yebin NAM ,  Daegeun YOON

IPC: H05G2/00 ,  G03F7/00

CPC classification number: H05G2/003 ,  G03F7/70033 ,  G03F7/70916 ,  H05G2/008 ,  G21K1/06

Abstract: An extreme ultraviolet light source device includes a chamber having a lower surface on which a condensing mirror is arranged, an intermediate focus, and a side surface between the lower surface and an upper surface a first exhaust port and a second exhaust port on the upper surface and spaced apart from the intermediate focus; a droplet supply adjacent to the side surface of the chamber, and configured to supply a droplet to generate the extreme ultraviolet light into the chamber; a light source configured to generate the extreme ultraviolet light by oscillating a laser; a catch adjacent to the side surface of the chamber, opposite to the droplet supply, and configured to receive the droplet discharged from the droplet supply unit; a first exhaust connected to the first exhaust port; and a second exhaust adjacent to the upper surface of the chamber, and connected to the second exhaust port.