公开(公告)号：US20240251544A1

公开(公告)日：2024-07-25

申请号：US18474394

申请日：2023-09-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： SEUNGMIN SHIN ,  SANGJUN PARK ,  SUNGJOO AN ,  KIJONG PARK ,  ILYOUNG YOON

IPC: H10B12/00

CPC classification number: H10B12/315 ,  H10B12/05

Abstract: A semiconductor memory device according to an embodiment includes: a substrate; a bit line positioned on the substrate and extending in a first direction; a channel accommodating insulating layer positioned on the substrate, and defining a channel trench exposing the bit line and extending in a second direction crossing the first direction; a channel layer extending along a bottom surface and a side surface of the channel trench and contacting the bit line; a word line positioned in the channel trench and extending in the second direction; a gate insulating layer positioned between the channel layer and the word line; and a capacitor structure positioned on the channel layer and electrically connected to the channel layer, in which the channel layer has a double layer structure of an oxide semiconductor layer and a first graphene layer.

公开(公告)号：US20230046060A1

公开(公告)日：2023-02-16

申请号：US17706336

申请日：2022-03-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： SANGJINE PARK ,  SEUNGMIN SHIN ,  JIHOON JEONG ,  YOUNG-HOO KIM ,  KUNTACK LEE

IPC: G03F7/30 ,  H01L21/687 ,  H01L21/68 ,  H02J7/00 ,  H02J50/20 ,  H01M10/46 ,  H01M10/44

Abstract: A substrate rotating apparatus may include a spin chuck supporting a substrate and a stage rotating the spin chuck about an axis parallel to a first direction. The spin chuck may include a first magnetic element and a substrate supporting member thereon. The stage may include a stage housing, a rotating part rotating about the axis, an inner control unit controlling rotation of the rotating part, a power supplying part supplying a power to the rotating part, and a wireless communication part receiving a control signal from an outside and transmitting the control signal to the inner control unit. The rotating part may include a second magnetic element spaced apart from the first magnetic element and a rotation driver rotating the second magnetic element. The rotating part, the inner control unit, the power supplying part, and the wireless communication part may be placed in the stage housing.