SEMICONDUCTOR DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME

    公开(公告)号:US20240215248A1

    公开(公告)日:2024-06-27

    申请号:US18219755

    申请日:2023-07-10

    CPC classification number: H10B43/35 H10B43/27

    Abstract: A semiconductor device includes gate layers and lower insulating layers that are alternately stacked on an upper surface of a substrate, a channel structure passing through the gate layers and the lower insulating layers and extending in a vertical direction, a string select gate layer disposed on the channel structure, a string select channel structure passing through the string select gate layer and extending in the vertical direction, and a contact pad disposed in a space between the channel structure and the string select channel structure and connecting the channel structure to the string select channel structure. A lower surface of the contact pad contacts the channel structure and an upper surface of the contact pad contacts the string select channel structure. A first width of the lower surface of the contact pad is greater than a second width of a central portion of the contact pad. A third width of the upper surface of the contact pad is greater than the second width of the central portion of the contact pad.

    INTEGRATED CIRCUIT DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME

    公开(公告)号:US20240107775A1

    公开(公告)日:2024-03-28

    申请号:US18368098

    申请日:2023-09-14

    CPC classification number: H10B51/20 H10B51/30

    Abstract: An integrated circuit device includes a plurality of conductive lines on a semiconductor substrate, the plurality of conductive lines extending in a horizontal direction and overlapping each other in a vertical direction, a plurality of insulating layers alternating with the plurality of conductive lines in a vertical direction and extending in the horizontal direction, and a channel structure extending through the plurality of conductive lines and the plurality of insulating layers in the vertical direction. The channel structure includes a core insulating layer, a channel layer on a side wall and a bottom surface of the core insulating layer, an information storage layer on an outside wall of the channel layer, and a pad pattern covering a top surface of the core insulating layer. The pad pattern contacts a portion of the outside wall of the channel layer and a topmost surface of the information storage layer.

    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20240015967A1

    公开(公告)日:2024-01-11

    申请号:US18308393

    申请日:2023-04-27

    CPC classification number: H10B43/27

    Abstract: In a method of manufacturing a semiconductor device, an insulation layer and a first gate electrode layer are alternately and repeatedly formed on a substrate in a first direction perpendicular to an upper surface of the substrate to form a mold layer. The first gate electrode layer includes silicon doped with impurities having a first conductivity type. An opening is formed through the mold layer to expose the upper surface of the substrate. Portions of the first gate electrode layers adjacent to the opening are removed to form gaps, respectively. Horizontal channels are formed in the gaps, respectively. Each of the horizontal channels includes silicon doped with impurities having a second conductivity type. A vertical gate structure extending in the first direction is formed in the opening. A memory channel structure is formed through the mold layer to contact the upper surface of the substrate.

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