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公开(公告)号:US20240306375A1
公开(公告)日:2024-09-12
申请号:US18444390
申请日:2024-02-16
Applicant: Samsung Electronics Co., Ltd.
Inventor: Suyoun Song , Yoongoo Kang , Kyungwook Park , Youmin Ban , Changwoo Seo , Hyunchul Shim
IPC: H10B12/00
CPC classification number: H10B12/482 , H10B12/02
Abstract: An integrated circuit device includes a substrate having a plurality of active regions, a bit line extending in a horizontal direction on the substrate, an insulating capping pattern formed on the bit line and extending along the bit line, a direct contact disposed in a direct contact hole formed on the substrate and connected between a first active region selected from among the plurality of active regions and the bit line, and a spacer structure contacting a sidewall of the direct contact and a sidewall of the bit line The spacer structure includes a first spacer layer extending in a vertical direction on the sidewall of the direct contact and the sidewall of the bit line, and a second spacer layer covering at least a portion of the first spacer layer and extending in the vertical direction.