公开(公告)号：US20160079320A1

公开(公告)日：2016-03-17

申请号：US14698045

申请日：2015-04-28

Applicant: Samsung Display Co., Ltd.

Inventor： Jeongho KIM ,  Hyunwoo KOO ,  Kihyun KIM ,  Sunho KIM ,  Taewoong KIM ,  Yeongon MO ,  Hayk KACHATRYAN

IPC: H01L27/32 ,  H01L51/00 ,  H01L51/56

CPC classification number: H01L27/3244 ,  H01L51/003 ,  H01L51/0097 ,  H01L51/56 ,  H01L2227/323 ,  H01L2227/326 ,  H01L2251/301 ,  H01L2251/5338 ,  Y02E10/549 ,  Y02P70/521

Abstract: Provided is a method of manufacturing a flexible display apparatus, the method including forming a sacrificial layer on a support substrate; forming a first material layer having a higher hydrogen concentration than the sacrificial layer on the sacrificial layer; forming a second material layer, preventing hydrogen diffusion from the first material layer to a flexible substrate, on the first material layer; forming the flexible substrate on the second material layer; forming a display layer on the flexible substrate; and irradiating a laser onto the support substrate to delaminate the sacrificial layer from the first material layer.

Abstract translation: 提供一种制造柔性显示装置的方法，该方法包括在支撑基板上形成牺牲层; 形成具有比牺牲层上的牺牲层更高的氢浓度的第一材料层; 形成第二材料层，防止在第一材料层上从第一材料层到柔性基板的氢扩散; 在第二材料层上形成柔性基板; 在柔性基板上形成显示层; 以及将激光照射到所述支撑基板上以使所述牺牲层与所述第一材料层分层。