公开(公告)号：US20210278280A1

公开(公告)日：2021-09-09

申请号：US17111258

申请日：2020-12-03

Applicant: Samsung Display Co., Ltd.

Inventor： Su Hwan LEE ,  Young Bae KEE ,  Min Woo KIM ,  Un Cheol SUNG ,  Byoung Gu AN ,  Jae Soo HA

IPC: G01J5/00 ,  B05B15/52 ,  G01J5/52 ,  G01J5/60

Abstract: A method for inspecting a nozzle includes: measuring a temperature of the nozzle; comparing the temperature of the nozzle with a reference temperature; and determining whether or not the nozzle is clogged based on the temperature of the nozzle.

公开(公告)号：US20170125680A1

公开(公告)日：2017-05-04

申请号：US15175282

申请日：2016-06-07

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Su Hwan LEE ,  Eun Ho KIM

IPC: H01L51/00 ,  H01L51/52 ,  H01L51/56

CPC classification number: H01L51/0012 ,  C23C14/00 ,  H01L51/0011 ,  H01L51/5237 ,  H01L51/56

Abstract: A deposition mask assembly includes a frame including a first opening portion and a second opening portion spaced apart from each other in a first direction, a first split mask group including a plurality of first split masks arranged on the first opening portion in a second direction crossing the first direction, and a second split mask group including a plurality of second split masks arranged on the second opening portion in the second direction, wherein a boundary between adjacent first split masks in the second direction and a boundary between adjacent second split masks in the second direction are at different positions.

公开(公告)号：US20190067584A1

公开(公告)日：2019-02-28

申请号：US16176012

申请日：2018-10-31

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Su Hwan LEE ,  Eun Ho KIM

IPC: H01L51/00 ,  H01L51/56 ,  C23C14/00 ,  H01L51/52

Abstract: A deposition mask assembly includes a frame including a first opening portion and a second opening portion spaced apart from each other in a first direction, a first split mask group including a plurality of first split masks arranged on the first opening portion in a second direction crossing the first direction, and a second split mask group including a plurality of second split masks arranged on the second opening portion in the second direction, wherein a boundary between adjacent first split masks in the second direction and a boundary between adjacent second split masks in the second direction are at different positions.