公开(公告)号：US09165809B2

公开(公告)日：2015-10-20

申请号：US14095344

申请日：2013-12-03

Applicant: Samsung Display Co., Ltd.

Inventor： Jin Woo Bae ,  Won Ho Kim ,  Bong Cheol Lee

IPC: B65G39/18 ,  B65G39/09 ,  H01L21/677 ,  B65G21/20

CPC classification number: H01L21/67706 ,  B65G21/2072 ,  B65G39/09 ,  B65G39/18

Abstract: A side roller moves up and down and a substrate transport device including the same prevents a substrate from being broken due to a foreign material decreasing wear of the side roller by transportation of the substrate. The side roller improves a yield of a transportation process.

Abstract translation: 侧辊上下移动，并且包括该侧辊的基板输送装置防止基板由于基板的输送而降低侧辊的磨损而破损。 侧辊提高了运输过程的产量。

公开(公告)号：US20140346006A1

公开(公告)日：2014-11-27

申请号：US14095344

申请日：2013-12-03

Applicant: Samsung Display Co., Ltd.

Inventor： Jin Woo Bae ,  Won Ho Kim ,  Bong Cheol Lee

IPC: B65G13/00

CPC classification number: H01L21/67706 ,  B65G21/2072 ,  B65G39/09 ,  B65G39/18

Abstract: A side roller moves up and down and a substrate transport device including the same prevents a substrate from being broken due to a foreign material decreasing wear of the side roller by transportation of the substrate. The side roller improves a yield of a transportation process.

Abstract translation: 侧辊上下移动，并且包括该侧辊的基板输送装置防止基板由于基板的输送而降低侧辊的磨损而破损。 侧辊提高了运输过程的产量。