Invention Grant
- Patent Title: Side roller and substrate transport device including the same
- Patent Title (中): 侧辊和包括其的基底输送装置
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Application No.: US14095344Application Date: 2013-12-03
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Publication No.: US09165809B2Publication Date: 2015-10-20
- Inventor: Jin Woo Bae , Won Ho Kim , Bong Cheol Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2013-0059706 20130527
- Main IPC: B65G39/18
- IPC: B65G39/18 ; B65G39/09 ; H01L21/677 ; B65G21/20
Abstract:
A side roller moves up and down and a substrate transport device including the same prevents a substrate from being broken due to a foreign material decreasing wear of the side roller by transportation of the substrate. The side roller improves a yield of a transportation process.
Public/Granted literature
- US20140346006A1 SIDE ROLLER AND SUBSTRATE TRANSPORT DEVICE INCLUDING THE SAME Public/Granted day:2014-11-27
Information query
IPC分类:
