-
公开(公告)号:US20230250526A1
公开(公告)日:2023-08-10
申请号:US18106097
申请日:2023-02-06
Applicant: Samsung Display Co., Ltd.
Inventor: Jaemin Hong , Jihwan Keum
IPC: C23C14/04
CPC classification number: C23C14/042
Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a mask assembly disposed in the chamber on a first side of a display substrate; a deposition source disposed to face the mask assembly and supplying a deposition material that passes through the mask assembly; and a magnetic force portion including a plurality of magnets extending in a first direction parallel to the mask assembly and disposed on a side opposite to the first side of the display substrate. The magnetic force portion reciprocates in a direction intersecting the first direction.