公开(公告)号：US20220114714A1

公开(公告)日：2022-04-14

申请号：US17362123

申请日：2021-06-29

Applicant: Samsung Display Co., Ltd.

Inventor： ILHA SONG ,  MIHYE KWON ,  JIMIN WOO ,  SANGDON HWANG

IPC: G06T7/00 ,  G01N21/956 ,  G06T7/11

Abstract: A mask inspection method includes photographing a cell mask through which openings is formed to obtain an image, setting an area of the image adjacent to an edge of the cell mask as an inspection area, comparing a grayscale of the openings in the inspection area with a reference grayscale, and checking a defect of the cell mask according to a result of the comparing of the grayscale of the openings.